Amateka yubushakashatsi
Akamaro ko gukoresha karibide ya silicon (SiC): Nkibikoresho bigari bya semiconductor, karbide ya silicon yakunze kwitabwaho cyane kubera amashanyarazi meza cyane (nka bande nini, umuvuduko mwinshi wa electron hamwe nubushyuhe bwumuriro). Iyi mitungo ituma ikoreshwa cyane mubikorwa byinshi, ubushyuhe bwo hejuru hamwe nimbaraga zikoresha ibikoresho cyane cyane mubijyanye na electronics power.
Ingaruka zinenge za kristu: Nubwo izo nyungu za SiC, inenge muri kristu ziracyari ikibazo gikomeye kibangamira iterambere ryibikoresho bikora neza. Izi nenge zirashobora gutera imikorere yibikoresho kandi bikagira ingaruka kubikoresho byizewe.
Tekinoroji ya X-ray yerekana amashusho: Kugirango tunonosore imikurire ya kirisiti kandi wumve ingaruka zinenge kumikorere yibikoresho, birakenewe kuranga no gusesengura imiterere yinenge muri kristu ya SiC. Ishusho ya X-ray yerekana amashusho (cyane cyane ikoresha imirasire ya synchrotron imirasire) yahindutse tekinike yingenzi yo kuranga ishobora kubyara amashusho yimiterere yimiterere yimbere ya kristu.
Ibitekerezo byubushakashatsi
Hashingiwe ku buhanga bwo kwigana imirasire: Ingingo ivuga ko hakoreshwa tekinoroji yo kwigana imishwarara ishingiye ku buryo bwo gutandukanya icyerekezo cyo kwigana itandukaniro ry’inenge ryagaragaye mu mashusho nyayo ya X-ray. Ubu buryo bwagaragaye ko aribwo buryo bwiza bwo kwiga imiterere yinenge za kirisiti mu bice bitandukanye bya semiconductor.
Kunoza tekinoroji yo kwigana: Mu rwego rwo kurushaho kwigana dislokasiyo zitandukanye zagaragaye muri kristu ya 4H-SiC na 6H-SiC, abashakashatsi bateje imbere tekinoroji yo kwigana imishwarara kandi bashiramo ingaruka zo kuruhuka hejuru no kwinjiza amashanyarazi.
Ibirimo ubushakashatsi
Isesengura ryubwoko bwa Dislocation: Ingingo isubiramo gahunda iranga ubwoko butandukanye bwa dislokasiyo (nka dislokasiyo ya screw, dislokasiyo yimpande, dislokasiyo ivanze, indege yibanze hamwe na Frank yo mu bwoko bwa Frank) muri polytypes zitandukanye za SiC (harimo 4H na 6H) ukoresheje imishwarara ya ray tekinoroji yo kwigana.
Ikoreshwa rya tekinoroji yo kwigana: Ikoreshwa rya tekinoroji yo gukwirakwiza imishwarara mu bihe bitandukanye nka beam topologiya idakomeye hamwe na topologiya y’indege, ndetse n’uburyo bwo kumenya ubujyakuzimu bwinjira mu buryo butandukanye hifashishijwe ikoranabuhanga ryigana.
Gukomatanya ubushakashatsi no kwigana: Mugereranije amashusho ya top-X ya topologiya yageragejwe hamwe namashusho yigana, ukuri kwa tekinoroji yo kwigana muguhitamo ubwoko bwa dislocation, vector ya Burgers hamwe no gukwirakwiza ahantu hatandukanye muri kristu biragenzurwa.
Imyanzuro yubushakashatsi
Ingaruka ya tekinoroji yo kwigana: Ubushakashatsi bwerekana ko tekinoroji yo gukwirakwiza imirasire yuburyo bworoshye, budasenya kandi budasobanutse kugirango hagaragazwe imiterere yubwoko butandukanye bwimurwa muri SiC kandi burashobora kugereranya neza ubujyakuzimu bwimbitse.
Isesengura rya dislokisiyo ya 3D: Binyuze mu ikoranabuhanga ryigana, isesengura rya dislokisiyo ya 3D no gupima ubucucike burashobora gukorwa, ibyo bikaba ari ngombwa mu gusobanukirwa imyitwarire n’ihindagurika rya dislokisiyo mugihe cyo gukura kwa kirisiti.
Ibizaza mu gihe kizaza: Biteganijwe ko tekinoroji yo kwigana ya Ray izashyirwa mu bikorwa ingufu za topologiya kimwe na laboratoire ishingiye kuri X-ray. Byongeye kandi, iryo koranabuhanga rishobora no kwagurwa mu kwigana inenge ziranga izindi polytypes (nka 15R-SiC) cyangwa ibindi bikoresho bya semiconductor.
Incamake
Igishushanyo 1: Igishushanyo mbonera cyerekana imirasire ya synchrotron X-ray topologiya yerekana amashusho, harimo kwanduza (Laue) geometrie, kugarura imiterere (Bragg) geometrie, no kurisha geometrie. Iyi geometrie ikoreshwa cyane cyane gufata amashusho ya X-ray topologiya.
Igishushanyo cya 2: Igishushanyo mbonera cya X-ray itandukanya agace kagoretse kazengurutse umugozi. Iyi shusho isobanura isano iri hagati yibyabaye (s0) hamwe nigitereko cyatandukanijwe (sg) nindege ya diffaction yindege isanzwe (n) hamwe na Bragg yaho (θB).
Igishushanyo cya 3: Inyuma-yerekana X-ray topografiya yerekana amashusho ya micropipes (abadepite) kuri wafer ya 6H - SiC no gutandukanya kwimurwa ryagereranijwe (b = 6c) mubihe bimwe byo gutandukana.
Igishushanyo cya 4: Micropipe ebyiri mumashusho-yerekana inyuma ya topografiya ya 6H - SiC wafer. Amashusho yabadepite bamwe bafite imyanya itandukanye hamwe nabadepite mubyerekezo bitandukanye byerekanwa na ray tracing simulation.
Igishushanyo 5: Ubwatsi bwo kurisha X-ray topografiya yerekana amashusho yafunzwe-yibanze ya disikuru (TSDs) kuri wafer ya 4H - SiC irerekanwa. Amashusho yerekana itandukaniro ryimbitse.
Igishushanyo cya 6: Ikigereranyo cyerekana ibimenyetso byo kurisha X-ray topografiya yerekana amashusho yi bumoso n’iburyo 1c TSDs kuri wafer ya 4H - SiC irerekanwa.
Igishushanyo 7: Ikigereranyo cyerekana amashusho ya TSDs muri 4H - SiC na 6H - SiC kirerekanwa, cyerekana dislokasiyo hamwe na za burger zitandukanye na polytypes.
Igishushanyo cya 8: Yerekana ubwatsi bwo kurisha X-ray topologiya yamashusho yubwoko butandukanye bwo gutandukanya impande zombi (TEDs) kuri wafer ya 4H-SiC, hamwe namashusho ya topologiya ya TED yigana hakoreshejwe uburyo bwo gukurikirana imirasire.
Igishushanyo 9: Yerekana X-ray-yerekana-yerekana amashusho ya topologiya yubwoko butandukanye bwa TED kuri wafer ya 4H-SiC, hamwe nikigereranyo cya TED.
Igishushanyo cya 10: Yerekana imishwarara yerekana amashusho yerekana amashusho avanze (TMDs) hamwe na Burgers yihariye, hamwe nubushakashatsi bwa topologiya.
Igishushanyo cya 11: Yerekana inyuma-yerekana amashusho ya topologiya yerekana indege yibanze (BPDs) kuri wafers ya 4H-SiC, nigishushanyo mbonera cyerekana imiterere itandukanye yo gutandukanya impande zombi.
Igishushanyo cya 12: Yerekana imishwarara yerekana amashusho yikigereranyo cyiburyo bwa BPDs iburyo bwimbitse ukurikije uburuhukiro bwubuso hamwe ningaruka zo kwinjiza amashanyarazi.
Igishushanyo cya 13: Yerekana imishwarara yerekana amashusho yikigereranyo cyiburyo bwa BPDs iburyo bwimbitse, hamwe nubwatsi bwo kurisha X-ray topologiya.
Igishushanyo cya 14: Yerekana igishushanyo mbonera cy’indege ya basal yoherejwe mu cyerekezo icyo ari cyo cyose kuri wafer ya 4H-SiC, nuburyo bwo kumenya ubujyakuzimu bwinjira mu gupima uburebure bwa projection.
Igishushanyo cya 15: Itandukaniro rya BPDs hamwe nuburyo butandukanye bwa Burgers hamwe nicyerekezo cyumurongo mugihe cyo kurisha amashusho ya X-ray topologiya, hamwe nibisubizo byerekana imishwarara.
Igishushanyo cya 16: Ishusho yerekana imishwarara yerekana ishusho ya TSD iburyo bwiburyo bwa TSD kuri wafer ya 4H-SiC, hamwe n’ishusho yo kurisha X-ray topologiya.
Igishushanyo 17: Imirasire yerekana imishwarara hamwe nishusho yubushakashatsi bwa TSD yataye umurongo kuri 8 ° offset ya 4H-SiC wafer irerekanwa.
Igishushanyo cya 18: Imirasire yerekana amashusho ya TSD na TMDs zahinduwe hamwe na Burgers zitandukanye ariko icyerekezo kimwe cyerekanwe.
Igishushanyo cya 19: Ishusho yerekana imishwarara yerekana ishusho yimiterere yubwoko bwa Frank, hamwe nuburwayi bujyanye no kurisha X-ray topologiya ishusho irerekanwa.
Igishushanyo cya 20: Ishusho yumweru yanduye X-ray topologiya ishusho ya micropipe kuri wafer ya 6H-SiC, kandi ishusho yerekana imishwarara yerekana imishwarara.
Igishushanyo cya 21: Ubwatsi bwo kurisha monochromatic X-ray topologiya ishusho yikigereranyo cyaciwe na 6H-SiC, hamwe nishusho yerekana imishwarara ya BPDs irerekanwa.
Igishushanyo cya 22: yerekana imishwarara yerekana amashusho ya BPDs muri 6H-SiC yaciwe ingero ku mpande zitandukanye.
Igishushanyo cya 23: yerekana imishwarara yerekana amashusho ya TED, TSD na TMDs muri 6H-SiC yaciwemo intangarugero munsi yuburumbuke bwa geometrie.
Igishushanyo cya 24: yerekana amashusho ya top-X ya topologiya ya TSDs yangiritse ku mpande zinyuranye zumurongo wa isoclinic kuri wafer ya 4H-SiC, hamwe nishusho yerekana imishwarara.
Iyi ngingo ni iyo gusangira amasomo gusa. Niba hari ihohoterwa, nyamuneka twandikire kugirango dusibe.
Igihe cyo kohereza: Jun-18-2024