Ubu buryo bugezweho bwo gupakira igice cya semiconductor buragenda butera imbere buhoro buhoro, ariko urugero ibikoresho nibikoresho byikoranabuhanga byifashishwa mugupakira semiconductor bigena neza ibyagezweho mubiteganijwe. Uburyo bwo gupakira igice cya semiconductor buracyafite ibibazo bitinze, kandi abatekinisiye ba entreprise ntibakoresheje neza sisitemu yububiko bwibikoresho byikora. Kubera iyo mpamvu, uburyo bwo gupakira igice cya semiconductor budafite inkunga ya tekinoroji yo kugenzura byikora bizatwara akazi nigihe kinini, bigatuma abatekinisiye bigora kugenzura neza ubwiza bwibikoresho bipfunyika.
Kimwe mu bintu by'ingenzi byo gusesengura ni ingaruka zuburyo bwo gupakira ku kwizerwa kw'ibicuruzwa bike-k. Ubusugire bwa zahabu-aluminiyumu ihuza insinga bigira ingaruka kubintu nkigihe nubushyuhe, bigatuma ubwizerwe bwayo bugabanuka mugihe kandi bikavamo impinduka mugice cyimiti yacyo, ibyo bikaba byaviramo gusibanganya mubikorwa. Kubwibyo, ni ngombwa kwitondera kugenzura ubuziranenge kuri buri cyiciro cyibikorwa. Gushiraho amatsinda yihariye kuri buri gikorwa birashobora gufasha gukemura ibyo bibazo neza. Gusobanukirwa nintandaro yibibazo bisanzwe no guteza imbere intego, ibisubizo byizewe nibyingenzi mugukomeza ubuziranenge bwibikorwa. By'umwihariko, imiterere yambere yinsinga zihuza, harimo udupapuro two guhuza hamwe nibikoresho byubatswe, bigomba gusesengurwa neza. Ubuso bwa padi bugomba guhorana isuku, kandi guhitamo no gushyira mubikorwa ibikoresho byo guhuza insinga, ibikoresho byo guhuza, hamwe nibipimo bigomba guhuza ibisabwa murwego rwo hejuru. Birasabwa guhuza tekinoroji yumuringa hamwe nu guhuza neza kugirango harebwe niba ingaruka za zahabu-aluminium IMC ku gupakira kwizerwa zigaragara cyane. Ku nsinga nziza-ihuza insinga, deformasiyo iyo ariyo yose irashobora guhindura ingano yimipira ihuza kandi ikabuza agace ka IMC. Kubwibyo rero, kugenzura ubuziranenge bukomeye mugihe cyibikorwa bifatika birakenewe, hamwe nitsinda hamwe nabakozi bakora ubushakashatsi bwimbitse kubikorwa byabo ninshingano zabo, bakurikiza ibisabwa nibikorwa kugirango bakemure ibibazo byinshi.
Ishyirwa mubikorwa ryuzuye rya semiconductor ipakira ifite imiterere yumwuga. Abatekinisiye ba rwiyemezamirimo bagomba gukurikiza byimazeyo intambwe yimikorere yo gupakira igice cya semiconductor kugirango bakore ibice neza. Nyamara, bamwe mubakozi ba rwiyemezamirimo ntibakoresha tekinoroji isanzwe kugirango barangize uburyo bwo gupakira igice cya semiconductor ndetse bakirengagiza kugenzura ibisobanuro hamwe nicyitegererezo cyibice bya semiconductor. Kubera iyo mpamvu, ibice bimwe na bimwe bya semiconductor bipakiye nabi, bikabuza igice cya kabiri gukora imirimo yacyo yibanze kandi bikagira ingaruka ku bukungu bwikigo.
Muri rusange, urwego rwa tekiniki rwo gupakira semiconductor ruracyakeneye kunozwa kuri gahunda. Abatekinisiye mu nganda zikora semiconductor bagomba gukoresha neza sisitemu yo gupakira ibikoresho byikora kugirango barebe neza ibice byose bya semiconductor. Abagenzuzi b'ubuziranenge bagomba gukora isuzuma ryuzuye kandi rikomeye kugirango bamenye neza ibikoresho bya semiconductor bipfunyitse nabi kandi bahite basaba abatekinisiye gukosora neza.
Byongeye kandi, murwego rwo guhuza imigozi yo kugenzura ubuziranenge, imikoranire hagati yicyuma nicyiciro cya ILD mugace gahuza insinga irashobora kuganisha ku gusenya, cyane cyane mugihe icyuma gihuza insinga hamwe nicyuma cyimbere / ILD cyahindutse muburyo bwigikombe . Ibi ahanini biterwa nigitutu ningufu za ultrasonic zikoreshwa nimashini ihuza insinga, igabanya buhoro buhoro ingufu za ultrasonic kandi ikohereza mukarere gahuza insinga, bikabangamira ikwirakwizwa rya atome ya zahabu na aluminium. Mu cyiciro cyambere, isuzumabumenyi rito-k chip wire ihuza ryerekana ko ibipimo byuburyo byoroshye. Niba ibipimo byo guhuza byashyizwe hasi cyane, ibibazo nkugucika insinga hamwe nintege nke bishobora kuvuka. Kongera ingufu za ultrasonic kugirango zishyure ibi birashobora kuvamo gutakaza ingufu no kongera ihinduka ryimiterere yibikombe. Byongeye kandi, intege nke zifatika hagati ya ILD nigice cyicyuma, hamwe nubugome bwibikoresho bike-k, nimpamvu zambere zogusenya icyuma kiva murwego rwa ILD. Izi ngingo ziri mubibazo byingenzi muburyo bwo gupakira igice cya semiconductor igenzura ubuziranenge no guhanga udushya.
Igihe cyo kohereza: Gicurasi-22-2024