CVD Silicon Carbide Coating-1

CVD SiC

Imyuka ya chimique (CVD) nuburyo bwo kubika vacuum ikoreshwa mugutanga ibikoresho bikomeye-bifite isuku. Ubu buryo bukoreshwa kenshi murwego rwo gukora semiconductor murwego rwo gukora firime yoroheje hejuru ya wafer. Muburyo bwo gutegura SiC na CVD, substrate ihura nabambere cyangwa benshi bahindagurika, bifata imiti hejuru yubutaka kugirango babike ububiko bwa SiC bwifuzwa. Muburyo bwinshi bwo gutegura ibikoresho bya SiC, ibicuruzwa byateguwe nububiko bwimyuka ya chimique bifite uburinganire nubuziranenge, kandi uburyo bufite uburyo bukomeye bwo kugenzura.

Ibikoresho bya CVD SiC birakwiriye cyane gukoreshwa munganda zikoresha igice cya kabiri gisaba ibikoresho bikora neza kubera guhuza kwihariye kwubushyuhe bwiza, amashanyarazi na chimique. Ibikoresho bya CVD SiC bikoreshwa cyane mubikoresho byo gutobora, ibikoresho bya MOCVD, ibikoresho bya epitaxial Si nibikoresho bya epitaxial SiC, ibikoresho byo gutunganya ubushyuhe bwihuse nizindi nzego.

Muri rusange, igice kinini cyisoko ryibice bya CVD SiC ni ibikoresho by ibikoresho. Bitewe nubushobozi buke hamwe nubushobozi bwa chlorine- na fluor zirimo imyuka ya ething, Carbide ya CVD silicon nikintu cyiza kubigize nkibikoresho byibanze mubikoresho bya plasma.

CVD silicon karbide yibikoresho mubikoresho byo kuriramo harimo impeta yibanze, imitwe ya gazi, gari ya moshi, impeta zimpande, nibindi. Dufashe impeta yibanze nkurugero, impeta yibanze ni ikintu cyingenzi gishyirwa hanze ya wafer kandi gihura neza na wafer. Mugukoresha voltage kumpeta kugirango yibanze kuri plasma inyura kumpeta, plasma yibanze kuri wafer kugirango itezimbere uburinganire.

Impeta gakondo yibanze ikozwe muri silicon cyangwa quartz. Hamwe niterambere ryoguhuza miniaturizasi yumuzunguruko, icyifuzo nakamaro ko gutunganya inzira mugukora inganda zuzuzanya biriyongera, kandi imbaraga nimbaraga za plasma yo gutera bikomeje kwiyongera. By'umwihariko, ingufu za plasma zisabwa mubikoresho bifata plasma bifatanyirijwe hamwe (CCP) ni byinshi, bityo igipimo cyo gukoresha impeta yibanze ikozwe mubikoresho bya karubide ya silicon iriyongera. Igishushanyo mbonera cya CVD silicon karbide yibanze irerekanwa hepfo: