Mu gukora semiconductor, hariho tekinike yitwa "etching" mugihe cyo gutunganya substrate cyangwa firime yoroheje yakozwe kuri substrate. Iterambere ry’ikoranabuhanga rya etching ryagize uruhare mu kumenya ubuhanuzi bwatanzwe na Gordon Moore washinze Intel mu 1965 ko "ubwinshi bw’imikorere ya tristoriste buzikuba kabiri mu myaka 1.5 kugeza kuri 2" (bakunze kwita "Amategeko ya Moore").
Kurya ntabwo ari "inyongera" nko kubitsa cyangwa guhuza, ahubwo ni "gukuramo". Byongeye kandi, ukurikije uburyo butandukanye bwo gusiba, igabanijwemo ibyiciro bibiri, aribyo "gutose bitose" na "gukama byumye". Kubivuga mu buryo bworoshye, icyambere nuburyo bwo gushonga naho ubundi nuburyo bwo gucukura.
Muri iyi ngingo, tuzasobanura muri make ibiranga itandukaniro rya buri tekinoroji yo gutobora, gutose no gutonyanga byumye, hamwe n’ahantu hasabwa buri kimwe kibereye.
Incamake yuburyo bwo gutobora
Ikoranabuhanga rya Etching ngo ryatangiriye mu Burayi hagati mu kinyejana cya 15. Muri icyo gihe, aside yasutswe mu isahani yometseho umuringa kugira ngo yonone umuringa wambaye ubusa, ikora intaglio. Ubuhanga bwo kuvura hejuru bukoresha ingaruka za ruswa bizwi cyane nka "etching."
Intego yuburyo bwo gutema mu gukora semiconductor nugukata substrate cyangwa firime kuri substrate ukurikije igishushanyo. Mugusubiramo intambwe zo kwitegura gushiraho firime, Photolithography, na etching, imiterere ya planar itunganyirizwa muburyo butatu.
Itandukaniro riri hagati yo gutose no gukama
Nyuma yuburyo bwa Photolithography, substrate igaragara itose cyangwa yumye mugihe cyo gutobora.
Gutose bitose bikoresha igisubizo kuri etch no gusiba hejuru. Nubwo ubu buryo bushobora gutunganywa vuba kandi bihendutse, ibibi ni uko gutunganya neza biri hasi gato. Kubwibyo rero, ibyatsi byumye byavutse ahagana mu 1970. Kurya byumye ntibikoresha igisubizo, ahubwo bikoresha gaze kugirango ikubite hejuru yubutaka kugirango ibishushanye, irangwa no gutunganya neza.
“Isotropy” na “Anisotropy”
Iyo utangije itandukaniro riri hagati yo gutose no gukama byumye, amagambo yingenzi ni "isotropic" na "anisotropic". Isotropy isobanura ko ibintu bifatika byibintu n'umwanya bidahinduka hamwe nicyerekezo, kandi anisotropy bivuze ko ibintu bifatika byibintu n'umwanya bitandukanye n'icyerekezo.
Isotropic etching isobanura ko guswera biva kumafaranga angana hafi yikintu runaka, naho gutera anisotropique bivuze ko guswera biva mubyerekezo bitandukanye bikikije ingingo runaka. Kurugero, mugutobora mugihe cyo gukora semiconductor, gutondeka anisotropique akenshi biratoranijwe kuburyo icyerekezo cyerekanwe gusa cyasibwe, hasigara ikindi cyerekezo kidahwitse.
Amashusho ya “Isotropic Etch” na “Anisotropic Etch”
Kurya neza ukoresheje imiti.
Gutose bitose bifashisha imiti hagati yimiti na substrate. Hamwe nubu buryo, gutera anisotropique ntibishoboka, ariko biragoye cyane kuruta guswera isotropic. Hano hari byinshi bibujijwe guhuza ibisubizo nibikoresho, nibisabwa nkubushyuhe bwa substrate, kwibanda kumuti, hamwe ninyongera bigomba kugenzurwa cyane.
Nuburyo ibintu byahinduwe neza gute, gutose bitose biragoye kugera kubikorwa byiza munsi ya 1 mm. Impamvu imwe yabyo nikeneye kugenzura kuruhande.
Gukuramo ibintu ni ibintu bizwi kandi nko gukata. Nubwo twizera ko ibikoresho bizaseswa gusa mu cyerekezo gihagaritse (icyerekezo cyimbitse) hifashishijwe ibishishwa bitose, ntibishoboka kubuza burundu igisubizo gukubita impande, bityo gusesa ibintu mubyerekezo bisa byanze bikunze bizakomeza . Bitewe nibi bintu, gutose bitose bitanga ibice bigufi kuruta ubugari bwintego. Muri ubu buryo, iyo gutunganya ibicuruzwa bisaba kugenzura neza ibyagezweho, kubyara ni bike kandi ubunyangamugayo ntabwo bwizewe.
Ingero Zishobora Kunanirwa Muburyo Bwuzuye
Ni ukubera iki kumisha byumye bikwiranye na micromachining
Ibisobanuro byubuhanzi Bifitanye isano Kuma byumye bikwiranye na anisotropic etching ikoreshwa mubikorwa byo gukora semiconductor bisaba gutunganywa neza. Kurya byumye bakunze kwitwa ion reaction (RIE), bishobora no kuba birimo plasma etching na sputter etching muburyo bwagutse, ariko iyi ngingo izibanda kuri RIE.
Kugirango usobanure impamvu gutera anisotropique byoroshye hamwe no gukama byumye, reka turebe neza inzira ya RIE. Biroroshye kubyumva mugabanye inzira yo gukama byumye no gukuraho substrate muburyo bubiri: "chimique chimique" na "etching physique".
Gutera imiti bibaho mubyiciro bitatu. Ubwa mbere, imyuka ihumanya yamamajwe hejuru. Ibicuruzwa bivamo reaction noneho bikozwe muri gaze ya reaction hamwe nibikoresho bya substrate, hanyuma amaherezo reaction yibikorwa. Mugukurikira kumubiri gukurikiraho, substrate ihagaritse kumanuka hepfo ukoresheje gaze ya argon ihagaritse kuri substrate.
Imiti ya chimique ibaho isotropically, mugihe guterwa kumubiri bishobora kubaho muburyo butandukanye mugucunga icyerekezo cyo gukoresha gaze. Kubera iyi mibiri yumubiri, kumisha byumye bituma igenzura cyane icyerekezo cyoguswera kuruta gutose.
Kuma byumye kandi bitose nabyo bisaba ibihe bikomeye nkibishishwa bitose, ariko bifite imyororokere myinshi kuruta gutose kandi bifite ibintu byinshi byoroshye-kugenzura. Kubwibyo, ntagushidikanya ko gutema byumye bifasha cyane umusaruro winganda.
Impamvu Kurakara Bitose Biracyakenewe
Umaze gusobanukirwa n'ibishobora kumera byumye, ushobora kwibaza impamvu gutonyanga bitose bikiriho. Ariko, impamvu iroroshye: gutonyanga neza bituma ibicuruzwa bihendutse.
Itandukaniro nyamukuru hagati yo gukama no gutonyanga bitose ni ikiguzi. Imiti ikoreshwa mubutaka butose ntabwo ihenze cyane, kandi igiciro cyibikoresho ubwacyo ngo ni 1/10 cyibikoresho byumye. Mubyongeyeho, igihe cyo gutunganya ni kigufi kandi substrate nyinshi zirashobora gutunganyirizwa icyarimwe, bikagabanya ibiciro byumusaruro. Nkigisubizo, turashobora kugumya ibiciro byibicuruzwa, bikaduha inyungu kurenza abo duhanganye. Niba ibisabwa kugirango bitunganyirizwe neza ntabwo biri hejuru, ibigo byinshi bizahitamo gutose kugirango bitange umusaruro mwinshi.
Igikorwa cyo guswera cyatangijwe nkinzira igira uruhare mu ikoranabuhanga rya microfabrication. Inzira yo guswera igabanijwemo ibice bitose kandi byumye. Niba ikiguzi ari ngombwa, icyambere ni cyiza, kandi niba microprocessing iri munsi ya 1 mm isabwa, ibyanyuma nibyiza. Byiza, inzira irashobora guhitamo ukurikije ibicuruzwa bigomba gukorwa nigiciro, aho kuba byiza.
Igihe cyo kohereza: Apr-16-2024