Ubwa mbere, shyira silikoni ya polycrystalline na dopants muri quartz ikomeye cyane mu itanura rimwe rya kirisiti, uzamure ubushyuhe kugera kuri dogere zirenga 1000, hanyuma ubone silikoni ya polyikristaline mumashanyarazi.
Gukura kwa silicon ni inzira yo gukora silikoni ya polyikristaline muri silikoni imwe. Nyuma ya silicon polycrystalline ishyutswe mumazi, ibidukikije byubushyuhe bigenzurwa neza kugirango bikure muburyo bwiza bwo hejuru.
Ibitekerezo bifitanye isano:
Gukura kristu imwe:Nyuma yubushyuhe bwa polycrystalline silicon yumuti uhamye, kristu yimbuto iramanurwa buhoro buhoro mumashanyarazi ya silicon (kristu yimbuto nayo izashonga mumashanyarazi ya silicon), hanyuma kristu yimbuto izamurwa mumuvuduko runaka kugirango imbuto ibe. inzira. Noneho, dislocations zakozwe mugihe cyimbuto zivanwaho binyuze mubikorwa byo kwizosi. Iyo ijosi ryagabanutse ku burebure buhagije, diameter ya silikoni imwe ya kirisiti nini yagurwa ku gaciro kayo muguhindura umuvuduko wo gukurura nubushyuhe, hanyuma diameter ingana ikomeza gukura kugirango uburebure bugere. Hanyuma, murwego rwo kubuza dislokisiyo kwaguka inyuma, ingoti imwe ya kirisiti irangiye kugirango ibone ingero imwe ya kirisiti, hanyuma ikurwe nyuma yubushyuhe bukonje.
Uburyo bwo gutegura silikoni imwe ya kirisiti:Uburyo bwa CZ nuburyo bwa FZ. Uburyo bwa CZ mu magambo ahinnye nkuburyo bwa CZ. Ikiranga uburyo bwa CZ ni uko bwakusanyirijwe muri sisitemu yubushyuhe ya silindiri igororotse, hakoreshejwe ubushyuhe bwo kurwanya grafite kugirango ushongeshe silikoni ya polycrystalline muri quartz ifite isuku nini cyane, hanyuma igashyiramo kristu yimbuto hejuru yubushonga kugirango isudire, mugihe kuzunguruka imbuto kristu, hanyuma igahindura ingirakamaro. Imbuto ya kirisiti yazamuwe buhoro buhoro hejuru, kandi nyuma yuburyo bwo gutera, kwaguka, kuzunguruka ibitugu, gukura kwa diameter ingana, no umurizo, haboneka silikoni imwe ya kirisiti.
Uburyo bwo gushonga bwa zone nuburyo bwo gukoresha ingunguru ya polycristaline kugirango ushonge kandi uhagarike kristu ya semiconductor ahantu hatandukanye. Ingufu zubushyuhe zikoreshwa mukubyara akarere gashonga kumpera imwe yinkoni ya semiconductor, hanyuma kristu imwe yimbuto ya kirisiti irasudwa. Ubushyuhe bwahinduwe kugirango akarere gashonga gahoro gahoro kerekeza ku rundi ruhande rwinkoni, kandi binyuze mu nkoni yose, kristu imwe irakura, kandi icyerekezo cya kristu ni kimwe nicy'imbuto ya kristu. Uburyo bwo gushonga bwa zone bugabanijwemo ubwoko bubiri: uburyo bwo gushonga zone itambitse hamwe nuburyo bwo guhagarikwa guhagarikwa. Iyambere ikoreshwa cyane mugusukura no gukura kristu imwe yibikoresho nka germanium na GaAs. Icya nyuma ni ugukoresha igiceri cyinshi cyane mu kirere cyangwa mu itanura rya vacuum kugirango habeho akarere gashongeshejwe muguhuza hagati yimbuto imwe ya kirisiti ya kirisiti hamwe ninkoni ya silikoni ya polycrystalline yahagaritswe hejuru yayo, hanyuma ukimura akarere gashongeshejwe hejuru kugirango ukure kamwe kristu.
Hafi ya 85% ya wafer ya silicon ikorwa nuburyo bwa Czochralski, naho 15% bya waferi ya silicon ikorwa nuburyo bwo gushonga zone. Ukurikije porogaramu, silikoni imwe ya kirisiti ihingwa nuburyo bwa Czochralski ikoreshwa cyane cyane mugukora ibice byumuzunguruko, mugihe silikoni imwe ya kirisiti ihingwa nuburyo bwo gushonga zone ikoreshwa cyane cyane mumashanyarazi. Uburyo bwa Czochralski bufite inzira ikuze kandi byoroshye gukura diametero nini imwe ya kirisiti ya kirisiti; uburyo bwo gushonga bwa zone gushonga ntabwo buhura na kontineri, ntabwo byoroshye kwanduzwa, bifite isuku irenze, kandi birakwiriye kubyara ibikoresho bya elegitoroniki bifite ingufu nyinshi, ariko biragoye gukura diameter nini nini ya kirisiti ya kirisiti, kandi muri rusange ikoreshwa kuri santimetero 8 cyangwa munsi ya diameter. Video irerekana uburyo bwa Czochralski.
Bitewe ningorabahizi zo kugenzura diameter yinkoni imwe ya kirisiti ya kirisiti mugikorwa cyo gukurura kristu imwe, kugirango ubone inkoni ya silicon ya diametre isanzwe, nka santimetero 6, santimetero 8, santimetero 12, nibindi nyuma yo gukurura imwe kristu, diameter ya silicon ingot izunguruka nubutaka. Ubuso bwinkoni ya silicon nyuma yo kuzunguruka biroroshye kandi ikosa ryubunini ni rito.
Ukoresheje tekinoroji igezweho yo guca insinga, ingot imwe imwe ya kirisiti yaciwe muri wafer ya silicon yuburebure bukwiye binyuze mubikoresho byo gutema.
Bitewe n'ubunini buke bwa silicon wafer, inkombe ya silicon wafer nyuma yo gukata irakaze cyane. Intego yo gusya impande nugukora impande zoroshye kandi ntabwo byoroshye gucika mubikorwa bizaza.
LAPPING ni ukongeramo wafer hagati yisahani iremereye hamwe nisahani yo hepfo ya kristu, hanyuma ugashyiraho igitutu hanyuma ukazenguruka hamwe na abrasive kugirango wafer igororoke.
Kurya ni inzira yo gukuraho ibyangiritse hejuru ya wafer, kandi hejuru yubutaka bwangijwe no gutunganyirizwa kumubiri bigaseswa numuti wimiti.
Gusya impande ebyiri ni inzira yo gukora wafer iryoshye no gukuraho utubuto duto hejuru.
RTP ni inzira yo gushyushya byihuse wafer mu masegonda make, kugirango inenge zimbere za wafer zibe zimwe, umwanda wibyuma urahagarikwa, kandi imikorere idasanzwe ya semiconductor irakumirwa.
Gusiga ni inzira ituma ubuso bugenda neza binyuze mumashanyarazi neza. Gukoresha ibishishwa byoroshye no gusya, bifatanije nubushyuhe bukwiye, umuvuduko numuvuduko ukabije, birashobora gukuraho ibyangiritse byangiritse byasizwe nibikorwa byabanjirije kandi bikabona wafer ya silicon hamwe nuburinganire bwiza.
Intego yo gukora isuku ni ugukuraho ibintu kama, ibice, ibyuma, nibindi bisigaye hejuru ya wafer ya silicon nyuma yo kubisiga, kugirango harebwe isuku yubuso bwa silicon kandi byujuje ubuziranenge bwibikorwa bizakurikiraho.
Igeragezwa rya tekinike & résistitivite itahura wafer ya silicon nyuma yo kuyisiga no kuyisukura kugirango harebwe niba umubyimba, uburinganire, uburinganire bwaho, kugabanuka, kurupapuro, kurwanywa, nibindi bya silikoni ya silikoni isennye yujuje ibyifuzo byabakiriya.
KUBARA MUBIKORWA ni inzira yo kugenzura neza ubuso bwa wafer, kandi inenge yubuso nubunini bigenwa no gukwirakwiza laser.
EPI GUKURA ni inzira yo gukura filime nziza ya silikoni nziza ya firime imwe ya kirisiti kuri wafer ya silikoni isennye ikoresheje imyuka ya chimique.
Ibitekerezo bifitanye isano:Gukura kwa Epitaxial: bivuga gukura kwikintu kimwe cya kirisiti hamwe nibisabwa hamwe nicyerekezo kimwe cya kirisiti kimwe na substrate kumurongo umwe wa kristu (substrate), kimwe na kristu yumwimerere irambuye hanze igice. Ikoreshwa rya Epitaxial tekinoroji ryakozwe mu mpera za 1950 no mu ntangiriro ya 1960. Muri kiriya gihe, kugira ngo hakorwe ibikoresho byinshi kandi bifite ingufu nyinshi, byabaye ngombwa ko bigabanya ubukangurambaga bwakusanyirijwe hamwe, kandi ibikoresho byasabwaga guhangana n’umuvuduko mwinshi n’umuyaga mwinshi, bityo rero byabaye ngombwa ko ukura cyane- kurwanya epitaxial layer kurwego rwo hasi-rurwanya. Agashya gashya kamwe kamwe kamwe gakuze karashobora gutandukana na substrate muburyo bwubwoko bwimikorere, kurwanya, nibindi, hamwe na kristu nyinshi igizwe na kristu yubunini butandukanye nibisabwa nabyo birashobora gukura, bityo bikazamura cyane imiterere yimiterere yibikoresho hamwe na imikorere yigikoresho.
Gupakira ni ugupakira ibicuruzwa byanyuma byujuje ibyangombwa.
Igihe cyo kohereza: Ugushyingo-05-2024