Impera yimbere yumusaruro ni nko gushiraho urufatiro no kubaka inkuta zinzu. Mu gukora semiconductor, iki cyiciro kirimo gukora ibyingenzi na transistors kuri wafer ya silicon.
Intambwe Zingenzi ZUBUNTU:
1. Isuku:Tangira na wafer yoroheje ya silicon hanyuma uyisukure kugirango ukureho umwanda wose.
2. Oxidation:Kura urwego rwa dioxyde ya silicon kuri wafer kugirango utandukanye ibice bitandukanye bya chip.
3. Photolithography:Koresha Photolithography kugirango ushushanye kuri wafer, bisa no gushushanya igishushanyo mbonera.
4. Kurya:Kuramo dioxyde ya silicon idakenewe kugirango ugaragaze imiterere wifuza.
5. Doping:Injira umwanda muri silicon kugirango uhindure imiterere yamashanyarazi, ukore transistor, ibice byubaka byibanze bya chip.
Hagati yumurongo wo hagati (MEOL): Guhuza Utudomo
Impera yo hagati yumurongo wibyakozwe ni nko gushiraho insinga n'amazi mumazu. Iki cyiciro cyibanze ku gushiraho amasano hagati ya tristoriste yakozwe murwego rwa FEOL.
Intambwe z'ingenzi za MEOL:
1. Kubika Dielectric:Kubitsa ibyingenzi (bita dielectrics) kugirango urinde transistors.
2. Guhuza amakuru:Kora imibonano kugirango uhuze tristoriste hamwe nisi yo hanze.
3. Guhuza:Ongeramo ibyuma kugirango ukore inzira zerekana ibimenyetso byamashanyarazi, bisa no kwifuza inzu kugirango umenye imbaraga zitagira ingano namakuru atemba.
Inyuma Yumurongo (BEOL): Kurangiza Gukoraho
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Impera yinyuma yumurongo wibikorwa ni nko kongeramo ibintu bya nyuma munzu - gushiraho ibikoresho, gushushanya, no kwemeza ko byose bikora. Mu gukora semiconductor, iki cyiciro kirimo kongeramo ibice byanyuma no gutegura chip yo gupakira.
Intambwe z'ingenzi za BEOL:
1. Ibindi byuma byongeweho:Ongeramo ibyuma byinshi kugirango wongere imikoranire, urebe ko chip ishobora gukora imirimo igoye n'umuvuduko mwinshi.
2. Passivation:Koresha ibice birinda kugirango ukingire chip kwangiza ibidukikije.
3. Ikizamini:Shyira chip mugupimisha gukomeye kugirango urebe ko yujuje ibisobanuro byose.
4. Gushushanya:Kata wafer muri chip imwe, buriwese yiteguye gupakira no gukoresha mubikoresho bya elegitoroniki.
Igihe cyo kohereza: Nyakanga-08-2024