Inzira nshya mu nganda za Semiconductor: Ikoreshwa rya tekinoroji yo Kurinda

Inganda za semiconductor zirimo kwiyongera bitigeze bibaho, cyane cyane mubice byasilicon karbide (SiC)ibikoresho bya elegitoroniki.Hamwe nini niniwaferfabs irimo kubakwa cyangwa kwaguka kugirango ishobore gukenera ibikoresho bya SiC mu binyabiziga byamashanyarazi, iri terambere ryerekana amahirwe adasanzwe yo kuzamura inyungu.Ariko, izana kandi ibibazo byihariye bisaba ibisubizo bishya.

Intandaro yo kongera umusaruro wa chip ya SiC kwisi yose ni ugukora kristu nziza ya SiC nziza, wafer, hamwe na epitaxial.Hano,icyiciro cya kabiri cya grafiteibikoresho bigira uruhare runini, byorohereza imikurire ya kirisiti ya SiC no gushira ibice bya epitaxial ya SiC.Graphite yubushyuhe bwumuriro nubusembure bituma iba ibikoresho byatoranijwe, bikoreshwa cyane mubibamba, abanyamaguru, disiki yimibumbe, hamwe na satelite muburyo bwo gukura kwa kirisiti na sisitemu ya epitaxy.Nubwo bimeze bityo ariko, ibintu bitoroshye biratera ikibazo gikomeye, biganisha ku kwangirika kwinshi kwibice bya grafite hanyuma bikabangamira umusaruro w’ibikoresho byo mu rwego rwo hejuru bya SiC na epitaxial.

Umusaruro wa kariside ya kariside ya silikoni ikubiyemo ibintu bigoye cyane, harimo ubushyuhe burenga 2000 ° C hamwe na gaze yangirika cyane.Ibi akenshi bivamo kwangirika kwuzuye kubutaka bwa grafite nyuma yinzira nyinshi, bityo ibiciro byumusaruro bikiyongera.Byongeye kandi, ibintu bikaze bihindura imiterere yimiterere yibice bya grafite, bikabangamira gusubiramo no gutuza mubikorwa byakozwe.

Kurwanya izo mbogamizi neza, tekinoroji yo gukingira igaragara nkumukino uhindura umukino.Imyenda ikingira ishingiyetantalum karbide (TaC)Byatangijwe kugirango bikemure ibibazo bya grafite ibice bitesha agaciro hamwe na grafite itangwa.Ibikoresho bya TaC byerekana ubushyuhe bwo gushonga burenga 3800 ° C hamwe n’imiti idasanzwe.Gukoresha ikoreshwa rya tekinoroji ya chimique (CVD),Ibikoresho bya TaChamwe nubugari bwa milimetero 35 zirashobora kubikwa muburyo butandukanye.Uru rwego rwo gukingira ntirwongera gusa ibintu bihamye ahubwo runongerera cyane igihe cyibice bigize grafite, bityo bikagabanya ibiciro byumusaruro no kuzamura imikorere.

Semicera, umuyobozi wambere utangaIbikoresho bya TaC, yagize uruhare runini mu guhindura inganda za semiconductor.Hamwe nikoranabuhanga rigezweho hamwe n’ubwitange budacogora ku bwiza, Semicera yatumye abakora inganda ziciriritse bashobora gutsinda imbogamizi zikomeye no kugera ku ntera nshya yo gutsinda.Mugutanga ibishishwa bya TaC bifite imikorere ntagereranywa kandi yizewe, Semicera yashimangiye umwanya wacyo nkumufatanyabikorwa wizewe kumasosiyete ya semiconductor kwisi yose.

Mu gusoza, tekinoroji yo gukingira ikingira, ikoreshwa nudushya nkaIbikoresho bya TaCkuva muri Semicera, irimo kuvugurura imiterere ya semiconductor no guha inzira ejo hazaza heza kandi harambye.