Uburyo bwo gutegura uburyo busanzwe bwa TaC busize ibice bya grafite

IGICE / 1
Uburyo bwa CVD (Kubika imyuka ya chimique):
Kuri 900-2300 ℃, ukoresheje TaCl₅na CnHm nka tantalum na karubone, H₂ nko kugabanya ikirere, gaze ya Ar₂as itwara, firime yo kubitsa. Igifuniko cyateguwe kiroroshye, kimwe kandi cyera cyane. Nyamara, hari ibibazo bimwe nkibikorwa bigoye, igiciro gihenze, kugenzura ikirere cyoroshye no gukora neza.
IGICE / 2
Uburyo bwo gucumura buhoro:
Igishishwa kirimo isoko ya karubone, isoko ya tantalum, ikwirakwiza na binder isize kuri grafite hanyuma ikayungurura ubushyuhe bwinshi nyuma yo gukama. Ipitingi yateguwe ikura idafite icyerekezo gisanzwe, ifite igiciro gito kandi irakwiriye kubyara umusaruro munini. Hasigaye gushakishwa kugirango habeho igifuniko kimwe kandi cyuzuye kuri grafite nini, gukuraho inenge ziterwa no kongera imbaraga zo guhuza.
IGICE / 3
Uburyo bwo gutera plasma:
Ifu ya TaC yashongeshejwe na plasma arc ku bushyuhe bwinshi, igashyirwa mu bitonyanga by’ubushyuhe bwo hejuru n’indege yihuta, hanyuma igaterwa hejuru y’ibikoresho bya grafite. Biroroshye gukora urwego rwa oxyde munsi ya vacuum, kandi ingufu ni nini.

 

Igishushanyo. Wafer tray nyuma yo gukoreshwa muri GaN epitaxial ikuze ya MOCVD (Veeco P75). Rimwe ibumoso ryashizweho na TaC naho iburyo ryashizweho na SiC.

TaCibice bya grafite bigomba gukemurwa

IGICE / 1
Imbaraga zihuza:
Coefficient yo kwagura amashyuza nibindi bintu bifatika hagati ya TaC nibikoresho bya karubone biratandukanye, imbaraga zo guhuza ingofero ni nkeya, biragoye kwirinda gucikamo ibice, imyenge hamwe nubushyuhe bwumuriro, kandi gutwikira biroroshye gukuramo mukirere nyirizina kirimo kubora kandi gusubiramo kuzamuka no gukonjesha.
IGICE / 2
Isuku:
Igikoresho cya TaCbigomba kuba bifite isuku ndende cyane kugirango twirinde umwanda n’umwanda mu gihe cy’ubushyuhe bwo hejuru, kandi ibipimo ngenderwaho bifatika hamwe n’ibipimo biranga imyuka ya karubone yubusa ndetse n’imbere y’imbere byuzuye bigomba kumvikana.
IGICE / 3
Igihagararo:
Kurwanya ubushyuhe bwinshi hamwe n’imiterere y’ikirere iri hejuru ya 2300 ℃ ni byo bipimo byingenzi byerekana ibipimo bifatika. Ibinogo, ibice, kubura inguni, hamwe n'imbibi imwe yerekana imipaka byoroshye biroroshye gutera imyuka yangirika kwinjira no kwinjira muri grafite, bikaviramo kunanirwa kurinda.
IGICE / 4
Kurwanya Oxidation:
TaC itangira okiside kuri Ta2O5 iyo iri hejuru ya 500 and, kandi igipimo cya okiside cyiyongera cyane hamwe no kwiyongera kwubushyuhe hamwe nubushakashatsi bwa ogisijeni. Ubuso bwa okisideya butangirira kumupaka wintete nintete nto, hanyuma buhoro buhoro bugakora kristu yinkingi hamwe na kristu yamenetse, bikavamo icyuho kinini nu mwobo, kandi kwinjira kwa ogisijeni gukomera kugeza igihe byambuwe. Igice cya oxyde yavuyemo gifite ubushyuhe buke bwamashanyarazi namabara atandukanye mubigaragara.
IGICE / 5
Guhuriza hamwe no gukomera:
Gukwirakwiza kutaringaniye hejuru yubuso burashobora gutuma habaho ubushyuhe bwumuriro waho, bikongera ibyago byo guturika no gutemba. Byongeye kandi, ububobere bwo hejuru bugira ingaruka ku buryo butaziguye imikoranire hagati y’igitwikiro n’ibidukikije byo hanze, kandi ubukana bukabije cyane butera kwiyongera kwiyongera hamwe na wafer n'umurima utanga ubushyuhe.
IGICE / 6
Ingano y'ibinyampeke:
Ingano imwe yintete ifasha guhagarara neza. Niba ingano y'ibinyampeke ari nto, umurunga ntuba ufunze, kandi biroroshye guhindurwamo okiside no kubora, bikavamo umubare munini wacitse nu mwobo ku nkombe z’ingano, ibyo bikaba bigabanya imikorere yo gukingira. Niba ingano ingano ari nini cyane, irasa nkaho itoroshye, kandi igipfundikizo kiroroshye guhita munsi yubushyuhe bwumuriro.