Gukora Semiconductor Ibikorwa - Ikoranabuhanga rya Etch

Amajana yinzira arasabwa guhindura awafermu gice cya kabiri. Imwe munzira zingenzi nikurira- ni ukuvuga, gushushanya ishusho nziza yumuzingi kuriwafer. Intsinzi yakurirainzira iterwa no gucunga ibintu bitandukanye murwego rwo kugabura, kandi buri bikoresho byo gutobora bigomba kuba byiteguye gukora mubihe byiza. Abashakashatsi bacu ba etching bakoresha tekinoroji yo gukora cyane kugirango barangize iyi nzira irambuye.
SK Hynix News Centre yabajije abanyamuryango ba Icheon DRAM Front Etch, Hagati ya Etch, na End Etch tekinike kugirango bamenye byinshi kubikorwa byabo.
Etch: Urugendo rwo Gutezimbere Umusaruro
Mubikorwa bya semiconductor, etching bivuga gushushanya kuri firime zoroshye. Ibishushanyo byatewe hakoreshejwe plasma kugirango ugire urutonde rwanyuma rwa buri ntambwe. Intego yacyo nyamukuru ni ukugaragaza neza imiterere ikurikije imiterere no gukomeza ibisubizo bimwe mubihe byose.
Niba ibibazo bibaye muburyo bwo kubika cyangwa gufotora, birashobora gukemurwa nubuhanga bwatoranijwe (Etch). Ariko, niba hari ibitagenda neza mugihe cyo guterana, ibintu ntibishobora guhinduka. Ni ukubera ko ibikoresho bimwe bidashobora kuzuzwa ahantu handitswe. Kubwibyo, mubikorwa byo gukora igice cya kabiri, gutondeka ni ngombwa kugirango umenye umusaruro rusange nubwiza bwibicuruzwa.

Inzira yo guteramo ikubiyemo intambwe umunani: ISO, BG, BLC, GBL, SNC, M0, SN na MLM.
Ubwa mbere, ISO (Isolation) icyiciro cya etic (Etch) silicon (Si) kuri wafer kugirango habeho agace gakora. Icyiciro cya BG (Gushyingura Irembo) kigize umurongo wa aderesi yumurongo (Ijambo Umurongo) 1 n irembo ryo gukora umuyoboro wa elegitoroniki. Ibikurikira, icyiciro cya BLC (Bit Line Contact) ikora ihuza hagati ya ISO numurongo wa aderesi yumurongo (Bit Line) 2 mukarere ka selire. Icyiciro cya GBL (Peri Irembo + Akagari ka Bit Line) icyiciro icyarimwe kizakora icyarimwe umurongo winkingi ya aderesi yumurongo hamwe n irembo muri peripheri 3.
Icyiciro cya SNC (Ububiko bwa Node Amasezerano) gikomeje gukora ihuriro hagati yakarere gakorerwamo nububiko bwa 4. Nyuma yaho, icyiciro cya M0 (Metal0) kigize aho gihurira na peripheri ya S / D (Ububiko bwa Node) 5 hamwe nu murongo uhuza hagati yinkingi ya aderesi yumurongo nububiko. Icyiciro cya SN (Ububiko Node) cyemeza ubushobozi bwibice, hanyuma icyiciro cya MLM (Multi Layer Metal) gikurikiraho gitanga amashanyarazi yo hanze hamwe nu nsinga zimbere, kandi inzira yubwubatsi yose (Etch) yararangiye.

Urebye ko abatekinisiye ba Etching (Etch) bashinzwe cyane cyane gushushanya imashanyarazi, ishami rya DRAM rigabanyijemo amakipe atatu: Imbere ya Etch (ISO, BG, BLC); Hagati yo hagati (GBL, SNC, M0); Kurangiza Etch (SN, MLM). Aya makipe nayo agabanijwe ukurikije imyanya yo gukora nu myanya yibikoresho.
Imyanya yo gukora ishinzwe gucunga no kunoza imikorere yumusaruro. Imyanya yinganda igira uruhare runini mugutezimbere umusaruro nubwiza bwibicuruzwa binyuze muguhindura ibintu hamwe nizindi ngamba zogutezimbere umusaruro.
Imyanya yibikoresho ishinzwe gucunga no gushimangira ibikoresho byumusaruro kugirango wirinde ibibazo bishobora kubaho mugihe cyo guterana. Inshingano yibanze yimyanya yibikoresho ni ukureba imikorere myiza yibikoresho.
Nubwo inshingano zisobanutse, amakipe yose akora agana kuntego imwe - ni ukuvuga gucunga no kunoza imikorere yumusaruro nibikoresho bifitanye isano no kuzamura umusaruro. Kugira ngo ibyo bigerweho, buri tsinda risangira byimazeyo ibyo rimaze kugeraho ndetse n’iterambere ryabyo, kandi rigafatanya kunoza imikorere y’ubucuruzi.
Nigute ushobora guhangana nibibazo bya tekinoroji ya miniaturizasiya

SK Hynix yatangiye gukora cyane ibicuruzwa 8Gb LPDDR4 DRAM kubicuruzwa 10nm (1a) muri Nyakanga 2021.

Semiconductor yibuka yumuzunguruko yinjiye mugihe cya 10nm, kandi nyuma yo kunonosorwa, DRAM imwe irashobora kwakira selile zigera ku 10,000. Kubwibyo, no muburyo bwo guswera, inzira yimikorere ntabwo ihagije.
Niba umwobo wakozwe (Hole) 6 ari nto cyane, irashobora kugaragara "idafunguwe" no guhagarika igice cyo hepfo ya chip. Byongeye, niba umwobo wakozwe ari munini cyane, "ikiraro" gishobora kubaho. Iyo ikinyuranyo kiri hagati yimyobo ibiri kidahagije, "ikiraro" kibaho, bikavamo ibibazo byo gufatana mu ntambwe zikurikira. Mugihe igice cya kabiri kiragenda kirushaho kunonosorwa, intera yubunini bwumwobo igenda igabanuka buhoro buhoro, kandi izo ngaruka zizakurwaho buhoro buhoro.
Kugira ngo ibibazo byavuzwe haruguru, abahanga mu ikoranabuhanga rya etching bakomeje kunoza imikorere, harimo guhindura uburyo bwo gutunganya inzira na algorithm ya APC7, no gutangiza tekinolojiya mishya nka ADCC8 na LSR9.
Mugihe abakiriya bakeneye guhinduka cyane, hagaragaye indi mbogamizi - inzira yumusaruro wibicuruzwa byinshi. Kugirango uhuze ibyo umukiriya akeneye, uburyo bwiza bwo gutunganya ibintu kuri buri gicuruzwa bugomba gushyirwaho ukundi. Iki nikibazo kidasanzwe kubashakashatsi kuko bakeneye gukora tekinoloji yumusaruro rusange yujuje ibyifuzo byombi byashizweho ndetse nuburyo butandukanye.
Kugira ngo ibyo bishoboke, abashakashatsi ba Etch berekanye ikoranabuhanga rya “APC offset” 10 yo gucunga ibikomoka ku bicuruzwa bitandukanye bishingiye ku bicuruzwa by’ibanze (Ibicuruzwa bikuru), banashyiraho kandi bakoresha “T-index system” mu gucunga neza ibicuruzwa bitandukanye. Binyuze muri izo mbaraga, sisitemu yagiye itezwa imbere kugirango ihuze ibikenerwa n’ibicuruzwa byinshi.