Isuku yaubuso bwa waferBizagira ingaruka cyane kubipimo byubushobozi bwa semiconductor ikurikira nibicuruzwa. Kugera kuri 50% byigihombo cyumusaruro uterwa naubuso bwa waferkwanduza.
Ibintu bishobora gutera impinduka zitagenzuwe mumikorere yamashanyarazi yibikoresho cyangwa uburyo bwo gukora ibikoresho hamwe hamwe byitwa umwanda. Umwanda urashobora guturuka muri wafer ubwayo, icyumba gisukuye, ibikoresho byo gutunganya, gutunganya imiti cyangwa amazi.Waferkwanduza birashobora kugaragara mubisanzwe kubireba, kugenzura inzira, cyangwa gukoresha ibikoresho byisesengura bigoye mugupima ibikoresho byanyuma.
Ibihumanya hejuru ya silicon wafers | Umuyoboro wamashusho
Ibisubizo byo gusesengura byanduye birashobora gukoreshwa kugirango bigaragaze urwego nubwoko bwanduye byahuye nawafermurwego runaka, intambwe yihariye cyangwa inzira rusange. Ukurikije ibyiciro byuburyo bwo gutahura,ubuso bwa waferkwanduza birashobora kugabanywa muburyo bukurikira.
Kwanduza ibyuma
Umwanda uterwa nicyuma urashobora gutera ibikoresho bya semiconductor inenge zitandukanye.
Ibyuma bya alkali cyangwa ubutaka bwa alkaline (Li, Na, K, Ca, Mg, Ba, nibindi) birashobora gutera imyuka iva mumiterere ya pn, nayo iganisha kumashanyarazi ya okiside; inzibacyuho nicyuma kiremereye (Fe, Cr, Ni, Cu, Au, Mn, Pb, nibindi) umwanda urashobora kugabanya ubuzima bwabatwara, kugabanya ubuzima bwa serivisi yibigize cyangwa kongera umwijima wijimye mugihe ibice bikora.
Uburyo busanzwe bwo kumenya ibyuma byanduye ni ibyerekana byose X-ray fluorescence, atomic absorption spectroscopy hamwe na plasma mass spectrometrie (ICP-MS).
▲ Ubuso bwanduye bwanduye | Ubushakashatsi
Kwanduza ibyuma birashobora guturuka kuri reagent zikoreshwa mugusukura, kuroba, lithographie, kubitsa, nibindi, cyangwa mumashini zikoreshwa muribikorwa, nk'itanura, reaction, gutera ion, nibindi, cyangwa birashobora guterwa no gufata neza wafer.
Umwanda wanduye
Kubitsa ibintu bifatika mubisanzwe bigaragazwa no kumenya urumuri rutatanye kuva ku busembwa. Kubwibyo, izina ryukuri rya siyanse yo kwanduza ibice ni inenge-ngingo. Kwanduza ibice bishobora gutera guhagarika cyangwa guhisha ingaruka muburyo bwo gutondeka no kwandika.
Mugihe cyo gukura kwa firime cyangwa kubitsa, havuka pinholes na microvoide, kandi niba ibice ari binini kandi bikayobora, birashobora no guteza imiyoboro migufi.
Gushiraho ibice byanduye | Umuyoboro wamashusho
Utuntu duto twanduye dushobora gutera igicucu hejuru, nko mugihe cyo gufotora. Niba ibice binini biri hagati ya fotomask na fotoreiste, birashobora kugabanya imiterere yo guhura.
Mubyongeyeho, barashobora guhagarika ion yihuse mugihe cyo gutera ion cyangwa kuruma. Ibice birashobora kandi kuba bifunzwe na firime, kugirango habeho ibisebe. Ibikurikira byabitswe birashobora gucika cyangwa kurwanya kwirundanya aha hantu, bigatera ibibazo mugihe cyo guhura.
Kwanduza umubiri
Ibihumanya birimo karubone, kimwe nuburyo bwo guhuza bifitanye isano na C, byitwa kwanduza umubiri. Umwanda wanduye urashobora gutera hydrophobique itunguranye kuriubuso bwa wafer, kongera ububobere bwubuso, kubyara ubuso bwijimye, guhagarika imikurire ya epitaxial, kandi bigira ingaruka kumasuku yo kwanduza ibyuma niba ibyanduye bidakuweho mbere.
Ubwo buryo bwanduye busanzwe bugaragazwa nibikoresho nka therm desorption MS, X-ray fotoelectron spectroscopy, na Auger electron spectroscopy.
Network Ishusho y'urusobe
Umwanda wanduye no kwanduza amazi
Molekile ya Atmospheric hamwe n’amazi yanduye hamwe nubunini bwa molekuline mubusanzwe ntibikurwaho numwuka usanzwe wogukora cyane (HEPA) cyangwa ultra-low penetration air filter (ULPA). Umwanda nkuyu ukurikiranwa na ion mass spectrometrie na capillary electrophoresis.
Ibihumanya bimwe bishobora kuba mubyiciro byinshi, kurugero, ibice bishobora kuba bigizwe nibikoresho kama cyangwa ibyuma, cyangwa byombi, ubwo rero ubwoko bwanduye bushobora no gushyirwa mubindi byiciro.
Molecular Umwuka wa molekile wanduye | IONICON
Byongeye kandi, kwanduza wafer birashobora kandi gushyirwa mubikorwa nko kwanduza molekile, kwanduza uduce, hamwe n’imyanda ikomoka ku myanda ikurikije ingano y’isoko yanduye. Ingano ntoya yingingo zanduye, niko kuyikuramo bigoye. Muri iki gihe mu bikoresho bya elegitoroniki, uburyo bwo gukora isuku bwa wafer bingana na 30% - 40% mubikorwa byose.
Ibihumanya hejuru ya silicon wafers | Umuyoboro wamashusho
Igihe cyo kohereza: Ugushyingo-18-2024