Uburyo dukora-gutunganya intambwe zo gutunganya SiC nuburyo bukurikira:
1. Icyerekezo cya Crystal: Gukoresha X-ray itandukanya kugirango yereke ingoro ya kristu. Iyo urumuri rwa X-rwerekejwe ku cyifuzo cya kirisiti cyifuzwa, inguni y’ibiti bitandukanijwe igena icyerekezo cya kristu.
2. Gusya kwa diameter yo hanze bigabanya kubunini busanzwe.
3.Gusya Kurangiza Isura: 4-cm 4H-SiC substrates mubusanzwe ifite impande ebyiri zumwanya, primaire na kabiri. Kurangiza gusya mumaso bifungura impande zumwanya.
4. Kubona insinga: Kubona insinga nintambwe yingenzi mugutunganya insimburangingo ya 4H-SiC. Kuvunika no kwangirika kwubutaka byatewe mugihe cyo kubona insinga bigira ingaruka mbi mubikorwa byakurikiyeho, byongerera igihe cyo gutunganya no gutakaza ibintu. Uburyo bukunze kugaragara ni insinga nyinshi hamwe na diyama abrasive. Icyerekezo cyisubiramo cyinsinga zicyuma zifatanije na diyama zikoreshwa mugukata ingot ya 4H-SiC.
5. Gutondagura: Kugirango wirinde gukata no kugabanya igihombo gishobora gukoreshwa mugihe cyakurikiyeho, impande zikarishye zicyuma cyogosha insinga zometse kumiterere yihariye.
6. Kunanuka: Gukata insinga bisiga ibishushanyo byinshi kandi byangiritse munsi. Kunanuka bikorwa hifashishijwe ibiziga bya diyama kugirango ukureho izo nenge bishoboka.
7. Gusya: Ubu buryo burimo gusya bikabije no gusya neza ukoresheje karbide ntoya ya karbide cyangwa diyama ikuraho ibyangiritse bisigaye hamwe n’ibyangiritse bishya byatangijwe mugihe cyo kunanuka.
8. Gusiga: Intambwe zanyuma zirimo guswera bikabije no gusya neza ukoresheje alumina cyangwa silicon oxyde abrasives. Amazi yo kwisiga yoroshya ubuso, hanyuma agakurwa muburyo bwa mashine. Iyi ntambwe itanga ubuso bworoshye kandi butangiritse.
9. Isuku: Kuraho ibice, ibyuma, firime ya oxyde, ibisigazwa kama, nibindi byanduza bisigaye mubikorwa byo gutunganya.
Igihe cyo kohereza: Gicurasi-15-2024