Ni izihe ntambwe z'ingenzi mu gutunganya insimburangingo ya SiC?

Uburyo dukora-gutunganya intambwe zo gutunganya SiC nuburyo bukurikira:

1. Icyerekezo cya Crystal: Gukoresha X-ray itandukanya kugirango yereke ingoro ya kristu.Iyo urumuri rwa X-rwerekejwe ku cyifuzo cya kirisiti cyifuzwa, inguni y’ibiti bitandukanijwe igena icyerekezo cya kristu.

2. Gusya Diameter yo hanze: Kirisiti imwe ikura mumababi ya grafite akenshi irenga diameter zisanzwe.Gusya kwa diameter yo hanze bigabanya kubunini busanzwe.

Kurangiza Isura Yanyuma: 4-inimero 4H-SiC substrates mubisanzwe ifite impande ebyiri zumwanya, primaire na kabiri.Kurangiza gusya mumaso bifungura impande zumwanya.

3. Kubona insinga: Kubona insinga nintambwe yingenzi mugutunganya substrate ya 4H-SiC.Kuvunika no kwangirika kwubutaka byatewe mugihe cyo kubona insinga bigira ingaruka mbi mubikorwa byakurikiyeho, byongerera igihe cyo gutunganya no gutakaza ibintu.Uburyo bukunze kugaragara ni insinga nyinshi hamwe na diyama abrasive.Icyerekezo cyisubiramo cyinsinga zicyuma zifatanije na diyama zikoreshwa mugukata ingot ya 4H-SiC.

4. Chamfering: Kugirango wirinde gukata no kugabanya igihombo gishobora gukoreshwa mugihe cyakurikiyeho, impande zikarishye zicyuma cyogosha insinga zometse kumiterere yihariye.

5. Kunanuka: Gukata insinga bisiga ibishushanyo byinshi kandi byangiritse munsi.Kunanuka bikorwa hifashishijwe ibiziga bya diyama kugirango ukureho izo nenge bishoboka.

6. Gusya: Iyi nzira ikubiyemo gusya bikabije no gusya neza ukoresheje karbide ntoya ya karbide cyangwa diyama ikuraho ibyangiritse bisigaye hamwe n’ibyangiritse bishya byatangijwe mugihe cyo kunanuka.

7. Gusiga: Intambwe zanyuma zirimo guswera bikabije no gusya neza ukoresheje alumina cyangwa silicon oxyde abrasives.Amazi yo kwisiga yoroshya ubuso, hanyuma agakurwa muburyo bwa mashine.Iyi ntambwe itanga ubuso bworoshye kandi butangiritse.

8. Isuku: Kuraho ibice, ibyuma, firime ya oxyde, ibisigazwa kama, nibindi byanduza bisigaye mubikorwa byo gutunganya.

Epitaxy ya SiC (2) - 副本 (1) (1)


Igihe cyo kohereza: Gicurasi-15-2024