Umuyoboro wa Epi ni iki?

Inganda za semiconductor zishingiye ku bikoresho byihariye byo gukora ibikoresho bya elegitoroniki byo mu rwego rwo hejuru. Kimwe mubintu byingenzi muburyo bwo gukura epitaxial ni epi paneri. Ibi bikoresho bigira uruhare runini mugushyira epitaxial layer kuri waferi ya semiconductor, bigatuma uburinganire nubwiza bwibicuruzwa byanyuma.

Epi pan itwara, izwi kandi nka epitaxy pan itwara, ni tray yabugenewe idasanzwe ikoreshwa mugukura kwa epitaxial. Ifata kandi igashyigikira wafer ya semiconductor mugihe cyo gushira epitaxial layers. Abatwara ibintu byashizweho kugirango bahangane nubushyuhe bwo hejuru hamwe nibidukikije byangirika bisanzwe mubikorwa bya epitaxial, bitanga urubuga ruhamye rwo gukura kwa kristu imwe.

Ibikoresho n'ubwubatsi:

Epi itwara ibisanzwe ikozwe mubikoresho bishobora kwihanganira ubushyuhe bukabije kandi birwanya imiti. Ibikoresho bisanzwe birimo:

•Silicon Carbide (SiC): Azwiho kuba afite ubushyuhe bwinshi bwo kurwanya ubushyuhe no kurwanya kwambara na okiside, SiC ni amahitamo azwi kubatwara epi pan.

• Graphite: Akenshi ikoreshwa bitewe nubushuhe buhebuje bwubushyuhe hamwe nubushobozi bwo kugumana ubusugire bwimiterere mubushyuhe bwinshi. Abatwara Graphite mubisanzwe basizwe hamwe na SiC kugirango bongere igihe kirekire no kurwanya ruswa.

Uruhare muri gahunda yo gukura kwa Epitaxial:

Iterambere rya epitaxial ririmo gushira ibintu bito cyane bya kristaline kuri substrate cyangwa wafer. Iyi nzira ningirakamaro mugukora ibikoresho bya semiconductor bifite ibikoresho byamashanyarazi neza. Epi pan itwara ishyigikira wafer mubyumba byerekana kandi ikemeza ko ikomeza guhagarara neza mugihe cyo kubitsa.

Ibikorwa byingenzi byabatwara epi pan harimo:

Ikwirakwizwa ry’ubushyuhe bumwe: Umwikorezi yemeza ko nogukwirakwiza ubushyuhe hejuru ya wafer, ari ngombwa kugirango umuntu agere ku burebure bwa epitaxial.

• Kwigunga kwa Shimi: Mugutanga ubuso butajegajega kandi butagira inert, uyitwara arinda imiti idakenewe ishobora gutesha agaciro ubwiza bwa epitaxial.

Inyungu zo mu rwego rwo hejuruEpi Abatwara:

• Kunoza imikorere yimikorere yibikoresho: Ibice bya epitaxial uniforme bigira uruhare mubikorwa byo hejuru byibikoresho bya semiconductor, bikavamo gukora neza no kwizerwa.

• Kongera umusaruro: Mugabanye inenge no kwemeza ko hashyirwaho ibice bimwe, abatwara ubuziranenge bwo mu rwego rwo hejuru bazamura umusaruro wa waferi ikoreshwa neza.

• Kugabanya ibiciro byo gufata neza: Ibikoresho biramba hamwe nubuhanga bwuzuye bigabanya gukenera gusimburwa no kubitaho kenshi, bikagabanya ibiciro byumusaruro rusange.

Epi pan itwara nikintu cyingenzi mubikorwa byo gukura kwa epitaxial, bigira ingaruka kumiterere no guhuza ibikoresho bya semiconductor. Muguhitamo ibikoresho byiza nigishushanyo mbonera, ababikora barashobora guhindura imikorere ya epitaxial, biganisha kumikorere yibikoresho no kugabanya ibiciro byumusaruro. Mugihe icyifuzo cyibikoresho bya elegitoroniki byateye imbere bigenda byiyongera, akamaro ko mu rwego rwo hejuruepi abatwaramu nganda za semiconductor zikomeje kwiyongera.