Gukura kwa epitaxial ni iki?

Gukura kwa Epitaxial ni tekinoroji ikura urwego rumwe rwa kirisiti kumurongo umwe wa kristu (substrate) hamwe na kristu yerekanwe kimwe na substrate, nkaho kristu yumwimerere yaguye hanze. Iyi mikorere mishya ikuze ya kirisiti irashobora gutandukana na substrate muburyo bwubwoko bwimikorere, irwanya, nibindi, kandi irashobora gukura ibice byinshi bya kristu ifite ubunini butandukanye nibisabwa bitandukanye, bityo bikazamura cyane imiterere yimiterere yibikoresho nibikorwa byimikorere. Byongeye kandi, epitaxial inzira nayo ikoreshwa cyane muburyo bwa tekinoroji ya PN ihuza abantu hamwe no kuzamura ireme ryibintu mumirongo minini ihuriweho.

Itondekanya rya epitaxy rishingiye cyane cyane kubigize imiti itandukanye ya substrate na epitaxial layer hamwe nuburyo butandukanye bwo gukura.
Ukurikije imiti itandukanye, imikurire ya epitaxial irashobora kugabanywamo ubwoko bubiri:

1. Homoepitaxial: Muri iki gihe, epitaxial layer ifite imiti ihwanye na substrate. Kurugero, ibice bya silicon epitaxial ikura neza kuri sisitemu ya silicon.

2. Heteroepitaxy: Hano, imiterere yimiti ya epitaxial layer itandukanye niyindi substrate. Kurugero, gallium nitride epitaxial layer ikura kumurongo wa safiro.

Ukurikije uburyo butandukanye bwo gukura, tekinoroji yo gukura epitaxial nayo ishobora kugabanywa muburyo butandukanye:

1.

. Ifite porogaramu nini mugutegura ibikoresho bya semiconductor hamwe nibikoresho.

3 Filime zateguwe nubu buhanga zirahujwe na substrate kandi akenshi zikoreshwa mugutegura ibikoresho bya semiconductor hamwe nibikoresho.

4. Vapor phase epitaxy (VPE): Koresha imyuka ya gaze kugirango ikore imiti yubushyuhe bwinshi kugirango itange ibikoresho bya firime bikenewe. Iri koranabuhanga rirakwiriye gutegurwa ahantu hanini, hujuje ubuziranenge bwa firime imwe ya kirisiti, kandi ni indashyikirwa cyane mugutegura ibikoresho bya semiconductor hamwe nibikoresho.

5. Epitaxy ya chimique yamashanyarazi (CBE): Iri koranabuhanga rikoresha imirasire yimiti kugirango ikure firime imwe ya kirisiti kuri sisitemu imwe ya kirisiti, ibyo bigerwaho mugucunga neza igipimo cyimiti yimiti nubucucike bwibiti. Ifite porogaramu nini mugutegura ubuziranenge bwo hejuru bwa kristu yoroheje.

6. Epitaxy ya Atomic layer epitaxy (ALE): Ukoresheje tekinoroji yo kubika atome, ibikoresho bya firime bisabwa bishyirwa kumurongo kumurongo kuri kristu imwe. Iri koranabuhanga rirashobora gutegura ahantu hanini, hujuje ubuziranenge bwa firime imwe ya kirisiti kandi ikoreshwa mugutegura ibikoresho bya semiconductor hamwe nibikoresho.

. Iri koranabuhanga naryo rirakwiriye mugutegura ahantu hanini, hujuje ubuziranenge bwa firime imwe ya kirisiti, kandi ikoreshwa cyane mugutegura ibikoresho bya semiconductor hamwe nibikoresho.