Niki MOCVD Susceptor?

Ububiko bwa Metal-Organic Chemical Vapor Deposition (MOCVD) ninzira yingenzi mubikorwa byinganda ziciriritse, aho firime nziza cyane zishyirwa mubutaka. Ikintu cyingenzi cyibikorwa bya MOCVD ni susceptor, ikintu cyingenzi kigira uruhare runini muguhuza ubuziranenge nubuziranenge bwa firime zakozwe.

Umukiriya ni iki? Susceptor nikintu cyihariye gikoreshwa mugikorwa cya MOCVD mugushigikira no gushyushya substrate yashyizwemo firime zoroshye. Ikora imirimo myinshi, harimo gukuramo ingufu za electromagnetique, kuyihindura ubushyuhe, no gukwirakwiza ubu bushyuhe hejuru ya substrate. Ubu bushyuhe bumwe ningirakamaro mu mikurire ya firime bahuje ibitsina hamwe nuburinganire bwuzuye.

Ubwoko bw'abakekwaho icyaha:
1. Graphite Susceptors: Mubisanzwe bitwikiriwe nurwego rukingira, nkasilicon karbide (SiC), ibishushanyo mbonera bya grafite bizwiho ubushyuhe bwinshi kandi butajegajega. UwitekaSiCitanga ubuso bukomeye, burinda kurwanya ruswa no kwangirika kubushyuhe bwinshi.

2. Silicon Carbide (SiC): Ibi bikozwe rwose muri SiC, bitanga ubushyuhe bwiza bwumuriro no kurwanya kwambara.SiCbirakwiriye cyane cyane ubushyuhe bwo hejuru hamwe nibidukikije byangirika.
NiguteAbakekwaho icyahaKora muri MOCVD:

Mubikorwa bya MOCVD, ababanjirije binjizwa mucyumba cya reaktor, aho babora kandi bakitwara kugirango bakore firime yoroheje kuri substrate. Susceptor igira uruhare runini mukwemeza ko substrate ishyuha kimwe, ibyo bikaba ari ngombwa kugirango umuntu agere kuri firime ihamye hejuru yubutaka bwose. Ibikoresho bya susceptor n'ibishushanyo byatoranijwe neza kugirango bihuze ibisabwa byihariye byo kubitsa, nk'ubushyuhe n'ubushyuhe bwo guhuza imiti.
Inyungu zo GukoreshaAbakiriya bo mu rwego rwo hejuru:
• Kuzamura ubuziranenge bwa firime: Mugutanga ubushyuhe bumwe, susceptors ifasha mukugera kuri firime zifite umubyimba uhoraho hamwe nibihimbano, nibyingenzi mugukora ibikoresho bya semiconductor.
• Kongera imikorere yuburyo bwiza: Suseptors yujuje ubuziranenge itezimbere muri rusange imikorere ya MOCVD mugabanya amahirwe yo kuba inenge no kongera umusaruro wa firime zikoreshwa.
Kuramba no kwizerwa: Suseptors ikozwe mubikoresho biramba nka SiC itanga igihe kirekire kandi ikagabanuka kubiciro byo kubungabunga.

Umwanzuro: Susceptor nikintu cyingenzi mubikorwa bya MOCVD, bigira ingaruka kumiterere no gukora neza bya firime yoroheje. Muguhitamo neza ibikoresho bya susceptor hamwe nigishushanyo, abakora semiconductor barashobora guhindura imikorere yabo, bikavamo imikorere myiza yibikoresho hamwe nigiciro cyibicuruzwa. Mugihe icyifuzo cyibikoresho bya elegitoroniki bikora cyane bikomeje kwiyongera, akamaro ka MOCVD nziza cyane