Niki MOCVD Susceptor?

UwitekaMOCVDuburyo ni bumwe mu buryo butajegajega bukoreshwa muri iki gihe mu nganda kugira ngo buteze imbere filime nziza yo mu bwoko bwa kristalline yoroheje, nk'icyiciro kimwe InGaN epilayers, ibikoresho bya III-N, na firime ya semiconductor hamwe na kwant kwinshi, kandi bifite akamaro kanini muri gukora ibikoresho bya semiconductor nibikoresho bya optoelectronic.

UwitekaSiC itwikiriye MOCVDni wafer yihariye ifatanije na karubide ya silicon (SiC) yaepitaxial gukura mubyuma kama ya chimique yamashanyarazi (MOCVD) inzira.

Ipfundikizo ya SiC ifite imiti irwanya imiti kandi itajegajega yubushyuhe, bigatuma ihitamo neza kubishobora kwanduza MOCVD ikoreshwa mugusaba gukura kwa epitaxial.

Ikintu cyingenzi cyibikorwa bya MOCVD ni susceptor, nikintu cyingenzi kugirango habeho uburinganire nubwiza bwa firime zakozwe.

Suseptor ni iki? Susceptor nikintu cyihariye gikoreshwa mugikorwa cya MOCVD mugushigikira no gushyushya substrate yashyizwemo firime yoroheje. Ifite imirimo myinshi, harimo gukuramo ingufu za electromagnetic, kuyihindura ubushyuhe, no gukwirakwiza ubushyuhe kuri substrate. Ubu bushyuhe bumwe ningirakamaro mu mikurire ya firime imwe yoroheje ifite ubunini bwuzuye hamwe nibigize.

Ubwoko bwa suseptors:
1silicon karbide (SiC), izwiho kuba ifite ubushyuhe bwinshi kandi butajegajega. UwitekaSiCitanga ubuso bukomeye, burinda kurwanya ruswa no kwangirika kubushyuhe bwinshi.

2. Indwara ya Silicon karbide (SiC): Izi suseptors zakozwe muri SiC zose kandi zifite ubushyuhe buhebuje bwumuriro kandi zidashobora kwihanganira. Indwara ya SiC irakwiriye cyane cyane ubushyuhe bwo hejuru hamwe nibidukikije byangirika.

Uburyo suseptors ikora muri MOCVD:

Mubikorwa bya MOCVD, abibanziriza binjizwa mubyumba byerekana aho babora hanyuma bakitwara kugirango bakore firime yoroheje kuri substrate. Susceptor igira uruhare runini mukwemeza ko substrate yashyutswe neza, ibyo bikaba ari ngombwa kugirango umuntu agere kuri firime ihamye hejuru yubutaka bwose. Ibikoresho nigishushanyo cya susceptor byatoranijwe neza kugirango byuzuze ibisabwa byihariye byo kubika, nkubushyuhe bwubushyuhe hamwe n’imiti ihuza.

Inyungu zo gukoresha sisitemu yo mu rwego rwo hejuru:
• Kuzamura ubuziranenge bwa firime: Mugutanga ubushyuhe bumwe, susceptor ifasha kugera kuri firime zifite umubyimba uhoraho hamwe nibihimbano, ibyo bikaba ari ingenzi kumikorere yibikoresho bya semiconductor.
• Kunoza imikorere neza: Suseptors yo mu rwego rwo hejuru yongera imikorere rusange yimikorere ya MOCVD mugabanya amahirwe yo kuba inenge no kongera umusaruro wa firime zikoreshwa.
• Kuramba no kwizerwa: Suseptors ikozwe mubikoresho biramba nka SiC byemeza igihe kirekire kandi bikagabanya amafaranga yo kubungabunga.

Susceptor nikintu cyingenzi mubikorwa bya MOCVD kandi bigira ingaruka muburyo bwiza no gukora neza. Kubindi bisobanuro kubunini buboneka, suseptors ya MOCVD nibiciro, nyamuneka ntutindiganye kutwandikira. Ba injeniyeri bacu bazishimira kukugira inama kubikoresho bikwiye no gusubiza ibibazo byawe byose.

Terefone: + 86-13373889683
WhatsAPP: + 86-15957878134
Email: sales01@semi-cera.com