SiC Paddle mubikorwa bya Semiconductor

Mu rwego rwo gukora semiconductor, theSiC Paddleigira uruhare runini, cyane cyane mubikorwa byo gukura epitaxial. Nka kintu cyingenzi cyakoreshejwe muriMOCVD(Metal Organic Chemical Vapor Deposition) sisitemu,SiC Paddleszashizweho kugirango zihangane ubushyuhe bwinshi hamwe nubushakashatsi bwangiza ibidukikije, bigatuma biba ingenzi mubikorwa byiterambere. Muri Semicera, tuzobereye mu gutanga umusaruro-mwinshiSiC Paddlesyagenewe byombiSi EpitaxynaSiC Epitaxy, gutanga uburebure budasanzwe hamwe nubushyuhe bwumuriro.

Imikoreshereze ya SiC Paddles yiganje cyane mubikorwa nko gukura kwa epitaxial, aho substrate ikenera imiterere yubushyuhe nubumara. Ibicuruzwa byacu bya Semicera byemeza imikorere myiza mubidukikije bisaba aMOCVD, aho urwego rwohejuru rwa silicon karbide rwashyizwe kuri substrate. Ibi bigira uruhare mu gutera imberewaferubuziranenge kandi buhanitse bwibikoresho mubikorwa bya semiconductor.

Semicera'sSiC Paddlesntibigenewe gusaSi Epitaxyariko kandi ihujwe nurutonde rwibindi bikorwa bikomeye. Kurugero, zirahujwe na PSS Etching zitwara, ingenzi mukubyara LED wafers, naAbatwara ICP, aho kugenzura neza ion birakenewe mugushiraho wafer. Iyi paddles ni ntangarugero muri sisitemu nkaAbatwara RTP.

Byongeye kandi, SiC Paddles ikora nka LED Epitaxial Susceptors, yorohereza imikurire ya waferi ikora neza. Ubushobozi bwo gukemura ibibazo bitandukanye byubushyuhe nibidukikije bituma bakora cyane muburyo butandukanye bwo guhimba semiconductor.

Muri rusange, Semicera yiyemeje gutanga SiC Paddles yujuje ibyangombwa bisabwa byinganda zigezweho. Kuva kuri SiC Epitaxy kugeza kuri MOCVD Susceptors, ibisubizo byacu bituma turushaho kwizerwa no gukora neza, duhuza ibyifuzo byinganda.