Silicon nitride (Si₃N₄) ceramics, nkibumba byubatswe byubatswe byubatswe, bifite ibintu byiza cyane nko guhangana nubushyuhe bwo hejuru, imbaraga nyinshi, ubukana bukabije, ubukana bwinshi, kurwanya ibinyabuzima, kurwanya okiside, no kwambara. Ikigeretse kuri ibyo, batanga imbaraga nziza zo guhangana nubushyuhe, ibintu bya dielectric, imiyoboro ihanitse yumuriro, hamwe nuburyo bwiza bwogukwirakwiza amashanyarazi. Iyi mitungo yuzuye yuzuye ituma ikoreshwa cyane mubice bigoye byubatswe, cyane cyane mu kirere no mubindi buhanga buhanitse.
Nyamara, Si₃N₄, kuba uruvange rufite imvano ikomeye ya covalent, ifite imiterere ihamye ituma gucumura mubucucike bukabije bigorana binyuze mu gukwirakwiza ibintu byonyine. Guteza imbere gucumura, imfashanyo zo gucumura, nka okiside yicyuma (MgO, CaO, Al₂O₃) hamwe nubutaka budasanzwe bwisi (Yb₂O₃, Y₂O₃, Lu₂O₃, CeO₂), byongeweho kugirango byoroherezwe binyuze muburyo bwo gucumura ibice.
Kugeza ubu, tekinoroji y’ibikoresho bya semiconductor ku isi iratera imbere yerekeza kuri voltage nyinshi, imigezi minini, n’ubucucike bukomeye. Ubushakashatsi muburyo bwo guhimba ibumba rya Si₃N₄ ni byinshi. Iyi ngingo itangiza uburyo bwo gucumura butezimbere ubwinshi bwimiterere nubukanishi bwuzuye bwa silicon nitride ceramics.
Uburyo busanzwe bwo gucumura kuri Si₃N₄ Ceramics
Kugereranya Imikorere ya Si₃N₄ Ceramics Yateguwe nuburyo butandukanye bwo gucumura
1. Gucumura neza (RS):Gucumura neza nuburyo bwambere bwakoreshejwe mugutegura inganda za Si₃N₄ ceramics. Nibyoroshye, birahenze, kandi birashobora gukora imiterere igoye. Nyamara, ifite urwego rurerure rwo gukora, rudafasha umusaruro-nganda.
2. Icyaha kitagira igitutu (PLS):Nuburyo bwibanze kandi bworoshye bwo gucumura. Ariko, birasaba ibikoresho byiza bya Si₃N₄ byo mu rwego rwo hejuru kandi akenshi bivamo ububumbyi bwubucucike buke, kugabanuka gukabije, hamwe no gucika cyangwa guhindura.
3. Gushushanya-Bishyushye (HP):Gukoresha ingufu za uniaxial pressure byongera imbaraga zo gutera gucumura, bigatuma ububumbyi bwimbitse butangwa mubushyuhe 100-200 ° C munsi ugereranije nibikoreshwa mugucumura. Ubu buryo busanzwe bukoreshwa muguhimba ibintu byoroheje bisa nkibumba ryibumba ariko biragoye kuzuza ubunini nuburyo bukenewe kubikoresho byubutaka.
4. Icapa rya Plasma Icapa (SPS):SPS irangwa no gucumura byihuse, gutunganya ingano, no kugabanya ubushyuhe bwo gucumura. Nyamara, SPS isaba ishoramari rikomeye mubikoresho, kandi itegurwa ryubushyuhe bwo hejuru bwa Si₃N₄ ceramics ikoresheje SPS iracyari mubigeragezo kandi itarashyirwa mubikorwa.
5. Gucumura gaze-GPS (GPS):Ukoresheje ingufu za gaze, ubu buryo burabuza kubora ceramic no kugabanuka kubushyuhe bwinshi. Biroroshye kubyara ububumbyi bwinshi cyane kandi butanga umusaruro. Nyamara, intambwe imwe ya gazi-yumuvuduko wo gucumura biragoye kubyara ibice byubaka bifite ibara ryimbere ninyuma hamwe nuburyo. Gukoresha intambwe ebyiri cyangwa intambwe nyinshi zo gucumura birashobora kugabanya cyane imyunyu ngugu ya ogisijeni hagati, kuzamura ubushyuhe bwumuriro, no kuzamura imitungo rusange.
Nyamara, ubushyuhe bwo hejuru bwa sinteri yintambwe ebyiri zo gucana gazi byatumye ubushakashatsi bwibanze bwibanda cyane cyane mugutegura insimburangingo ya ceramic ya Si₃N₄ ifite ubushyuhe bwinshi nubushyuhe bwo mucyumba. Ubushakashatsi kuri ceramika ya Si₃N₄ ifite imiterere yubukanishi hamwe nubushyuhe bwo hejuru bwubushyuhe bwo hejuru.
Gazi-Umuvuduko Wuburyo bubiri bwo gucumura kuri Si₃N₄
Yang Zhou na bagenzi be bo muri kaminuza y’ikoranabuhanga ya Chongqing bakoresheje sisitemu yo gufashanya ya 5 wt.% Yb₂O₃ + 5 wt. Ubukorikori bwa Si₃N₄ bwakozwe nintambwe ebyiri zo gucumura bwari bufite ubucucike buri hejuru hamwe nuburyo bwiza bwubukanishi. Ibikurikira byerekana incamake yingaruka zintambwe imwe nintambwe ebyiri za gazi yumuvuduko ukabije kuri microstructure hamwe nubukanishi bwibikoresho bya ceramic Si₃N₄.
Ubucucike Inzira ya Si₃N₄ isanzwe ikubiyemo ibyiciro bitatu, hamwe no guhuzagurika hagati yicyiciro. Icyiciro cya mbere, ibice byongeye gutondekanya, nicyiciro cya kabiri, gusesa-imvura, nintambwe zikomeye zo kwiyongera. Igihe gihagije cyo kwitwara muriki cyiciro gitezimbere cyane ubwinshi bwicyitegererezo. Iyo ubushyuhe bwabanjirije gucumura kubikorwa byintambwe ebyiri zo gucumura bishyizwe kuri 1600 ° C, ibinyampeke β-Si₃N₄ bigize urwego kandi bigakora imyenge ifunze. Nyuma yo gucumura, kongera gushyuha munsi yubushyuhe bwinshi hamwe numuvuduko wa azote utera umuvuduko wamazi no kuzura, bifasha kurandura imyenge ifunze, bikarushaho kunoza ubwinshi bwubutaka bwa Si₃N₄. Kubwibyo, ibyitegererezo byakozwe nintambwe ebyiri zo gucumura byerekana ubwinshi nubucucike ugereranije nibyakozwe nintambwe imwe.
Icyiciro na Microstructure Mugihe cyintambwe imwe yo gucumura, igihe kiboneka cyo guhinduranya ibice no gukwirakwiza imipaka ni bike. Muburyo bubiri bwo gucumura, intambwe yambere ikorwa kubushyuhe buke hamwe na gaze ya gaze, ibyo bikaba byongera igihe cyo guhinduranya ibice hanyuma bikavamo ingano nini. Ubushyuhe noneho bwiyongera kugeza ku bushyuhe bwo hejuru, aho ibinyampeke bikomeza gukura binyuze mu nzira ya Ostwald yeze, bikabyara ubukana bwinshi bwa Si₃N₄ ceramics.
Ibikoresho bya mashini Kworoshya icyiciro cyimiterere yubushyuhe bwinshi nimpamvu yambere yo kugabanya imbaraga. Muntambwe imwe yo gucumura, imikurire idasanzwe itera imyenge mito hagati yintete, ikabuza iterambere ryinshi mubushyuhe bwo hejuru. Nyamara, muburyo bubiri bwo gucumura, icyiciro cyikirahure, kigabanijwe kimwe mumipaka yintete, hamwe nintete zingana zingana byongera imbaraga zimibumbe, bigatuma imbaraga zo hejuru zubushyuhe bwo hejuru.
Mu gusoza, gufata umwanya muremure mugihe cyo gutera intambwe imwe birashobora kugabanya neza ububobere bwimbere kandi bikagera kumabara yimbere hamwe nimiterere ariko birashobora gutuma imikurire idasanzwe idasanzwe, itesha agaciro imiterere yubukanishi. Ukoresheje uburyo bubiri bwo gucumura-ukoresheje ubushyuhe buke mbere yo gucumura kugirango wongere igihe cyo guhinduranya uduce hamwe nubushyuhe bwo hejuru kugirango uteze imbere ingano imwe - ceramic ya Si₃N₄ ifite ubucucike bwa 98.25%, microstructure imwe, hamwe nibikoresho byiza byubukanishi Birashobora gutegurwa neza.
| Izina | Substrate | Igice cya Epitaxial | Epitaxial inzira | Epitaxial medium |
| Silicon homoepitaxial | Si | Si | Icyuka Icyiciro Epitaxy (VPE) | SiCl4+H2 |
| Silicon heteroepitaxial | Safiro cyangwa spinel | Si | Icyuka Icyiciro Epitaxy (VPE) | SiH₄ + H₂ |
| GaAs homoepitaxial | GaAs | GaAs GaAs | Icyuka Icyiciro Epitaxy (VPE) | AsCl₃ + Ga + H₂ (Ar) |
| GaAs | GaAs GaAs | Epitexy ya Molecular Beam (MBE) | Ga + Nk | |
| GaAs heteroepitaxial | GaAs GaAs | GaAlAs / GaAs / GaAlAs | Icyiciro cya Liquid Epitaxy (LPE) Icyiciro cya Vapor (VPE) | Ga + Al + CaAs + H.2 Ga + AsH3PH3CHl + H.2 |
| GaP homoepitaxial | GaP | GaP (GaP; N) | Icyiciro cya Liquid Epitaxy (LPE) Icyiciro cya Liquid Epitaxy (LPE) | Ga + GaP + H.2+ (NH3) Ga + GaAs + GaP + NH3 |
| Ubuntu | GaAs | GaAlAs / GaAs (cycle) | Epitexy ya Molecular Beam (MBE) MOCVD | Ca, Nk, Al GaR₃ + AlR3 + AsH3 + H2 |
| InP homoepitaxial | InP | InP | Icyuka Icyiciro Epitaxy (VPE) Icyiciro cya Liquid Epitaxy (LPE) | PCl3 + Muri + H2 Muri + InAs + GaAs + InP + H₂ |
| Si / GaAs Epitaxy | Si | GaAs | Epitexy ya Molecular Beam (MBE) MOGVD | Ga 、 Nk GaR₃ + AsH₃ + H₂ |
Igihe cyo kohereza: Ukuboza-24-2024