Kumenyekanisha abatwara wafer
CATAGORY
▶Sisitemu Yabatwara Sisitemu ya PECVD & TALOX
• Ubwato bwa Graphite ya PECVD & TALOX (M4 ~ M12)
• Ubwato bwa SM-Ubwato (M4, M6)
• Gutera & kwiyuhagira Igishushanyo (M4 ~ M6)
• C / C Gariyamoshi & Ceramic
• Icyuma RIE-Tray & Ceramic Coating
• Gufunga Vacuum: O-Impeta & SQ-Impeta
▶Guhindura imyenda & Wet Etching Transfer Process
• LSC H-Carrier cyangwa cassette (M4 ~ M12)
• LSC V-Umwikorezi cyangwa cassette (M4 ~ M12)
• ASC itwara cyangwa cassette (M4, M6)
• W / F Utwara & Agasanduku k'ububiko (M4 ~ M12)
• Urukurikirane rw'ibiziga (Roller)
▶Imirasire y'izuba hamwe nicyuma
• Umwikorezi wa TRC cyangwa cassette (M4 ~ M12)
• Ikinyamakuru (hamwe na BELT)
UBWOKO BWA GRAPHITE (H-Ubwoko)
19P6-216CT (WF M4 ~ M12)
UBWOKO BWA GRAPHITE (H-Ubwoko)
21P6-240CT WF M4 ~ M12)
UBWOKO BWA GRAPHITE (H-Ubwoko)
23P7-308CT (W / F M4 ~ M12)
UBWOKO BWA GRAPHITE (H-Ubwoko)
22P / 7-294TP (W / F M4 ~ M12)
UBWOKO BWA GRAPHITE (H-Ubwoko)
W182-22P7-294CT (W / F M12)
W182-21P6-240CT (W / F M12)
WF CARRIER & BOX BOX (~ M12)
C / C GUKURIKIRA CYANGWA CARRIER (M4 ~ M10)
C / C GUKURIKIRA CYANGWA CARRIER (M4 ~ M10)
Ubwato VERTICAL (SM) M6
LSC-H-CARRIER (~ M12)
LSC-V-CARRIER (~ M12)
ASC CARRIER (~ M6)
UMUYOBOZI WA TRC (~ M12)
UMUYOBOZI WA TRC (~ M12)
GRAPHITE-Ubwato (M12)
Sisitemu Yabatwara Sisitemu ya PECVD
BO Ubwato bwa GRAPHITE (CT-Bwashizweho) M10 / M12 Inzira
• ICYEMEZO CY'UMWIHARIKO
BO Ubwato bwa GRAPHITE (CT-Bwashizweho) M4 / M6 Inzira
▶ Ibikoresho by'ubwato
BO Ubwato VERTICAL-161.7mm WAFER
BO Ubwato VERTICAL-166mm WAFER
BO Ubwato VERTICAL-161.7mm, WAFER 166mm
Imirasire y'izuba hamwe nicyuma cya TRC
UBWOKO: Automation
SIZE WAFER: ① 156 × 156MM ② 156.75 × 156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180 × 180mm ⑥ 210 × 210mm
GUKORESHA: Twara (Cassette)
UBUSHOBOZI: urupapuro 100
PITCH: 4.76MM / 5.953mm / 6.35mm
DIMENSION: Hafi 559 × 220 × 220MM
Hafi ya 712 × 260 × 260MM
INYUNGU: Ikirere
BIKORESHEJWE: URURIMI, URUBUGA RWA BAR-Aluminium (anodizing)
URUPAPURO RWA Side-POM (Antistatike)
Igipfukisho cyo hasi-EPDM / PU / VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
SHOWER PLATE & IMPLANT, CARRIER
