Silicon carbide ceramic chucks

Ibisobanuro bigufi:

WeiTai Energy Technology Co., Ltd. nisoko ritanga amasoko meza ya semiconductor ceramics kandi rukora uruganda rukumbi mubushinwa rushobora icyarimwe gutanga silicon karbide ceramic (cyane cyane theYongeye gushyirwaho SiC) hamwe na CVD SiC.Mubyongeyeho, isosiyete yacu yiyemeje kandi mumirima yubutaka nka alumina, nitride ya aluminium, zirconi, na nitride ya silicon, nibindi.


Ibicuruzwa birambuye

Ibicuruzwa

Isahani ya SiC ni ubwoko bwa 0 porosity yuzuye umubiri wubutaka, bushingiye kuri SiC kandi bugacumita kuri 2250 ℃.Ibirimo bya SiC birenga 99,6%, imbaraga zo kugonda zirenze 410mpa naho ubushyuhe bwumuriro ni 140W / MK nicyo kintu cyonyine ceramique cyihanganira HF, H2SO4 nibindi byangiza aside。

Ibyiza bya silicon karbide ceramics:

1, coefficient yo kwagura ubushyuhe ni nto, hafi ya silicon;

2, kwihanganira kwambara neza, gukomera kumwanya wa kabiri nyuma ya diyama;

3, amashanyarazi meza cyane, kurwanya ubushyuhe bwinshi no kugabanuka vuba;

Silicon carbide chuck3

Ibipimo bya tekiniki

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