Silicon carbide wafer inzira yo gukora

Silicon carbide waferikozwe mu ifu ya silicon isukuye cyane hamwe nifu ya karubone isukuye nkibikoresho fatizo, na kariside ya silicon karbide ikura nuburyo bwo kohereza imyuka yumubiri (PVT), hanyuma igatunganyirizwasilicon karbide wafer.

Synt synthesis. Ifu ya silicon nziza cyane hamwe nifu ya karubone isukuye yavanze ukurikije igipimo runaka, kandi ibice bya karubide ya silicon byakoreshwaga mubushyuhe bwo hejuru ya 2000 ℃. Nyuma yo kumenagura, gusukura nibindi bikorwa, harategurwa ibikoresho byinshi bya silicon karbide yifu ya pisitori yujuje ibyangombwa byo gukura kwa kirisiti.

Growth Gukura kwa kirisiti. Ukoresheje ifu yuzuye ya SIC nkibikoresho fatizo, kristu yakuze hakoreshejwe uburyo bwo kohereza imyuka yumubiri (PVT) ikoresheje itanura ryikura rya kirisiti.

Gutunganya. Ibikoresho bya silikoni yabonetse ya kirisiti ya kirisiti yerekejwe na X-ray imwe ya kirisiti yerekana icyerekezo, hanyuma ikazunguruka ikazunguruka, hanyuma igatunganyirizwa muri diameter isanzwe ya silicon karbide kristal.

Cuting Gukata Crystal. Ukoresheje ibikoresho byinshi byo gutema imirongo, kristu ya silicon karbide yaciwe mumabati yoroheje afite umubyimba utarenze 1mm.

Gusya. Wafer ni hasi kubushake bwifuzwa no gukomera ukoresheje diyama yo gusya ya flux yubunini butandukanye.

Ip Chip polishing. Carbide ya silicon isennye nta kwangirika kwubutaka yabonetse hakoreshejwe imashini ya mashini hamwe nubushakashatsi bwimiti.

Kumenya Chip. Koresha microscope optique, X-ray diffractometer, microscope yingufu za atome, igeragezwa ridahuza kwipimisha, igeragezwa ryuburinganire bwubutaka, igeragezwa ryuzuye ryuzuye hamwe nibindi bikoresho nibikoresho kugirango umenye ubucucike bwa microtubule, ubwiza bwa kirisiti, ububobere buke, kurwanya, kurupapuro, kugabanuka, umubyimba uhindagurika, gushushanya hejuru nibindi bipimo bya silicon karbide wafer. Ukurikije ibi, urwego rwiza rwa chip ruramenyekana.

Cleaning Gukora chip. Urupapuro rwa silicon karbide isukuye hamwe nogusukura hamwe namazi meza kugirango ukureho ibisigazwa bisigara bisigara hamwe nundi mwanda wubutaka hejuru kurupapuro rusya, hanyuma wafer ihuhwa kandi ikanyeganyezwa byumye na azote nini cyane ya azote na mashini yumisha; Wafer ikubiye mu gasanduku gasukuye mu cyumba gisukuye cyane kugira ngo habeho epfo na ruguru yiteguye-gukoresha-silicon karbide wafer.

Ninini ya chip nini, niko bigoye gukura kwa tekinoroji yo gutunganya no gutunganya tekinoroji, hamwe nubushobozi buke bwo gukora ibikoresho byo hasi, nigiciro cyikiguzi.