Silicon carbide wafer inzira yo gukora

Silicon carbide waferikozwe mu ifu ya silicon isukuye cyane hamwe nifu ya karubone isukuye nkibikoresho fatizo, na kirisiti ya kariside ya silicon ikura nuburyo bwo kohereza imyuka yumubiri (PVT), hanyuma igatunganyirizwasilicon karbide wafer.

Synthesis Sintezike yibikoresho.Ifu ya silicon nziza cyane hamwe nifu ya karubone isukuye yavanze ukurikije igipimo runaka, kandi ibice bya karubide ya silikoni byakoreshwaga mubushyuhe bwinshi hejuru ya 2000 ℃.Nyuma yo kumenagura, gusukura nibindi bikorwa, hateguwe ibikoresho byinshi byimbuto ya silicon karbide yifu yujuje ibyangombwa byo gukura kwa kristu.

Growth Gukura kwa kirisiti.Ukoresheje ifu ya SIC isukuye nkibikoresho fatizo, kristu yakuze nuburyo bwo kohereza imyuka yumubiri (PVT) ikoresheje itanura ryikura rya kirisiti.

Gutunganya.Ibikoresho bya silicon karbide byabonetse byerekejwe na X-ray imwe ya kristaliste yerekanwe, hanyuma hasi irazunguruka, hanyuma itunganyirizwa muri diameter isanzwe ya silicon karbide kristal.

Cuting Gukata Crystal.Ukoresheje ibikoresho byinshi byo gutema, kristu ya kariside ya silicon yaciwe mumabati yoroheje afite umubyimba utarenze 1mm.

Gusya.Wafer ni hasi kubushake bwifuzwa no gukomera ukoresheje diyama yo gusya ya diyama zingana zingana.

Ip Chip polishing.Carbide ya silicon isennye nta kwangirika kwubutaka yabonetse hakoreshejwe imashini ya mashini hamwe nubushakashatsi bwimiti.

Kumenya Chip.Koresha microscope optique, X-ray diffractometer, microscope yingufu za atome, igeragezwa ridahuza kwipimisha, igeragezwa ryuburinganire bwubutaka, igeragezwa ryuzuye ryuzuye hamwe nibindi bikoresho nibikoresho kugirango umenye ubucucike bwa microtubule, ubwiza bwa kirisiti, ubukana bwubutaka, ubukana, intambara, kugabanuka, umubyimba uhindagurika, gushushanya hejuru nibindi bipimo bya silicon karbide wafer.Ukurikije ibi, urwego rwiza rwa chip ruramenyekana.

Cleaning Gukora isuku.Urupapuro rwa silicon karbide isukuye hamwe nogusukura hamwe namazi meza kugirango ukureho ibisigazwa bisigara bisigara hamwe nundi mwanda wubutaka hejuru kurupapuro rusya, hanyuma wafer ihuhwa kandi ikanyeganyezwa byumye na azote nini cyane ya azote na mashini yumisha;Wafer ikubiye mu gasanduku gasukuye mu cyumba gisukuye cyane kugira ngo habeho epfo na ruguru yiteguye-gukoresha-silicon karbide wafer.

Ninini ya chip ingano, niko bigorana gukura kwiterambere rya kristu no gutunganya tekinoroji, hamwe nubushobozi buke bwo gukora ibikoresho byo hasi, nigiciro cyikiguzi.