4 ″ 6 ″ 8 ″ Imyitozo ngororamubiri & Semi-insulation

Ibisobanuro bigufi:

Semicera yiyemeje gutanga ibikoresho byujuje ubuziranenge bya semiconductor, nibikoresho byingenzi byo gukora ibikoresho bya semiconductor. Substrates zacu zigabanyijemo ubwoko bwimyitwarire nigice cyo guhuza ibyifuzo bikenewe bitandukanye. Mugusobanukirwa byimazeyo imiterere yamashanyarazi ya substrate, Semicera igufasha guhitamo ibikoresho bibereye kugirango umenye imikorere myiza mugukora ibikoresho. Hitamo Semicera, hitamo ubuziranenge buhebuje bushimangira kwizerwa no guhanga udushya.


Ibicuruzwa birambuye

Ibicuruzwa

Carbide ya Silicon (SiC) ibikoresho bya kirisiti imwe ifite ubugari bunini bwikigero kinini (~ Si inshuro 3), ubushyuhe bwinshi bwo hejuru (~ Si inshuro 3.3 cyangwa GaAs inshuro 10), umuvuduko mwinshi wimuka wa electron (~ Si inshuro 2,5), amashanyarazi menshi yameneka umurima (~ Si inshuro 10 cyangwa GaAs inshuro 5) nibindi biranga ibintu byiza.

Igisekuru cya gatatu ibikoresho bya semiconductor birimo cyane cyane SiC, GaN, diyama, nibindi, kubera ko ubugari bwacyo bwagutse (Eg) burenze cyangwa bungana na volt ya electron ya 2.3 (eV), izwi kandi nkibikoresho bigari bya semiconductor. Ugereranije n’ibikoresho bya semiconductor yo mu gisekuru cya mbere n’icya kabiri, ibikoresho bya semiconductor yo mu gisekuru cya gatatu bifite ibyiza byo gutwara amashanyarazi menshi, umurima w'amashanyarazi wangiritse cyane, umuvuduko mwinshi wimuka wa electron hamwe ningufu nyinshi zihuza, zishobora kuzuza ibisabwa bishya byikoranabuhanga rya kijyambere rya kijyambere kuri byinshi ubushyuhe, imbaraga nyinshi, umuvuduko mwinshi, inshuro nyinshi hamwe no kurwanya imirasire nibindi bihe bibi. Ifite ibyifuzo byingenzi byokurikizwa mubijyanye no kurinda igihugu, indege, ikirere, ubushakashatsi bwa peteroli, kubika optique, nibindi, kandi birashobora kugabanya igihombo cyingufu zirenga 50% mubikorwa byinshi byingenzi nkitumanaho ryagutse, ingufu zizuba, inganda zikora imodoka, itara rya semiconductor, hamwe na gride yubwenge, kandi irashobora kugabanya ingano yibikoresho hejuru ya 75%, ibyo bikaba bifite akamaro kanini mugutezimbere ubumenyi bwikoranabuhanga.

Ingufu za Semicera zirashobora guha abakiriya uburyo bwiza bwo kuyobora (Conductive), Semi-insulation (Semi-insulation), HPSI (High Purity semi-insulating) silicon karbide substrate; Mubyongeyeho, turashobora guha abakiriya impapuro za silicon karbide epitaxial; Turashobora kandi guhitamo urupapuro rwa epitaxial dukurikije ibyo abakiriya bakeneye bakeneye, kandi nta mubare muto wateganijwe.

KUBONA UMWIHARIKO

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo 8-cm 6-cm 4-inim
nP n-Pm n-Zab SI SI
TTV (GBIR) ≤6um ≤6um
Umuheto (GF3YFCD) -Agaciro keza ≤15μm ≤15μm ≤25μm ≤15μm
Intambara (GF3YFER) ≤25μm ≤25μm ≤40μm ≤25μm
LTV (SBIR) -10mmx10mm <2 mm
Wafer Edge Beveling

BURUNDU

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-Insulation

ltem 8-cm 6-cm 4-inim
nP n-Pm n-Zab SI SI
Kurangiza Impande ebyiri Optical Polonye, ​​Si- Isura CMP
Ubuso (10um x 10um) Si-FaceRa≤0.2nm
C-Isura Ra≤ 0.5nm
(5umx5um) Si-Isura Ra≤0.2nm
C-Isura Ra≤0.5nm
Imipira Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm)
Ibimenyetso Nta na kimwe cyemewe
Igishushanyo (Si-Isura) Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer
Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer
Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer
Ibice Nta na kimwe cyemewe
Guhezwa 3mm
第 2 页 -2
第 2 页 -1
SiC wafers

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