Kurwanya anti-okiside isukuye cyane SiC yatwikiriye tray ya MOCVD

Ibisobanuro bigufi:

Semicera Energy Technology Co., Ltd nisoko ritanga isoko ryinzobere mugukoresha wafer kandi igezweho.Twiyemeje gutanga ibicuruzwa byiza-byizewe, byizewe, kandi bishya mubikorwa bya semiconductor,inganda zifotorahamwe nizindi nzego zijyanye.

Umurongo wibicuruzwa byacu birimo SiC / TaC wasize ibicuruzwa bya grafite nibicuruzwa bya ceramic, bikubiyemo ibikoresho bitandukanye nka karubide ya silicon, nitride ya silicon, na oxyde ya aluminium nibindi nibindi.

Nkumutanga wizewe, twumva akamaro k'ibikoreshwa mugikorwa cyo gukora, kandi twiyemeje gutanga ibicuruzwa byujuje ubuziranenge bwo hejuru kugirango ibyo abakiriya bacu bakeneye.

 

Ibicuruzwa birambuye

Ibicuruzwa

Ibisobanuro

Isosiyete yacu iratangaSiCserivisi zitunganijwe nuburyo bwa CVD hejuru ya grafite, ceramique nibindi bikoresho, kugirango imyuka idasanzwe irimo karubone na silikoni ikora ubushyuhe bwinshi kugirango ibone molekile nziza ya SiC, molekile zashyizwe hejuru yibikoresho bisize, bikoraSIC ikingira.

 

Ibyingenzi

1. Kurwanya ubushyuhe bukabije bwa okiside:
kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.
2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.
3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.
4. Kurwanya ruswa: aside, alkali, umunyu hamwe na reagent.

Ibyingenzi byingenzi bya CVD-SIC

Ibiranga SiC-CVD
Imiterere ya Crystal FCC β icyiciro
Ubucucike g / cm ³ 3.21
Gukomera Vickers gukomera 2500
Ingano y'ibinyampeke μm 2 ~ 10
Ubuziranenge bwa Shimi % 99.99995
Ubushyuhe J · kg-1 · K-1 640
Ubushyuhe bwo hejuru 2700
Imbaraga zidasanzwe MPa (RT-amanota 4) 415
Umusore Modulus Gpa (4pt yunamye, 1300 ℃) 430
Kwagura Ubushyuhe (CTE) 10-6K-1 4.5
Amashanyarazi (W / mK) 300
MOCVD EPITAXIAL PARTS
Disiki ya MOCVD

Umwirondoro w'isosiyete

Semicera Energy nimwe mubakora nogutanga silicon karbide yubatswe epitaxial sheet pallets mubushinwa.Ibicuruzwa byacu byingenzi birimo: Amasahani ya silicon karbide, amamodoka ya silicon karbide,silicon carbide wafer ubwato(PV & Semiconductor), silicon karbide itanura,silicon carbide cantilever paddles, silicon karbide chucks, ibiti bya silicon karbide, kimweCVD SiCna TaC.

Ibicuruzwa bikoreshwa cyane cyane munganda za semiconductor ninganda zifotora, nko gukura kwa kirisiti, epitaxy, etching, gupakira, gutwikira hamwe nibikoresho byo gutanura.Gura SIC isize epitaxial sheet pallets hamwe nibiciro biri muruganda rwacu.Dufite ikirango cyacu kandi dushyigikiye byinshi.Niba ushishikajwe nibicuruzwa byacu, tuzaguha igiciro gihenze.Murakaza neza kubicuruzwa byujuje ubuziranenge bigezweho.

Isosiyete yacu ifite ibikoresho byuzuye byo kubyaza umusaruro nko kubumba, gucumura, gutunganya, ibikoresho byo gutwikira, nibindi, bishobora kuzuza amahuza yose akenewe yumusaruro wibicuruzwa kandi bikagenzurwa cyane nubwiza bwibicuruzwa;Gahunda nziza yumusaruro irashobora gutoranywa ukurikije ibikenerwa nibicuruzwa, bikavamo igiciro gito no guha abakiriya ibicuruzwa birushanwe;Turashobora gukora neza kandi neza gahunda yumusaruro dushingiye kubisabwa byo gutanga ibicuruzwa kandi dufatanije na sisitemu yo gucunga ibicuruzwa kumurongo, guha abakiriya igihe cyihuse kandi cyizewe.
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