LED etch Silicon carbide ifite tray, ICP tray (Etch)

Ibisobanuro bigufi:

Semicera Energy Technology Co., Ltd nisoko ritanga isoko ryinzobere mugukoresha wafer kandi igezweho.Twiyemeje gutanga ibicuruzwa byiza-byizewe, byizewe, kandi bishya mubikorwa bya semiconductor,inganda zifotorahamwe nizindi nzego zijyanye.

Umurongo wibicuruzwa byacu birimo SiC / TaC wasize ibicuruzwa bya grafite nibicuruzwa bya ceramic, bikubiyemo ibikoresho bitandukanye nka karubide ya silicon, nitride ya silicon, na oxyde ya aluminium nibindi nibindi.

Nkumutanga wizewe, twumva akamaro k'ibikoreshwa mugikorwa cyo gukora, kandi twiyemeje gutanga ibicuruzwa byujuje ubuziranenge bwo hejuru kugirango ibyo abakiriya bacu bakeneye.

 

Ibicuruzwa birambuye

Ibicuruzwa

Ibisobanuro ku bicuruzwa

Isosiyete yacu itanga serivisi zo gutunganya SiC hakoreshejwe uburyo bwa CVD hejuru ya grafite, ceramique nibindi bikoresho, kugirango imyuka idasanzwe irimo karubone na silikoni ikora ubushyuhe bwinshi kugirango ibone molekile nziza ya SiC, molekile zashyizwe hejuru yibikoresho bisize, gukora urwego rwo kurinda SIC.

Ibyingenzi byingenzi:

1. Kurwanya ubushyuhe bukabije bwa okiside:

kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.

2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.

3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.

4. Kurwanya ruswa: aside, alkali, umunyu hamwe na reagent.

Ibyingenzi byingenzi bya CVD-SIC

Ibiranga SiC-CVD

Imiterere ya Crystal

FCC β icyiciro

Ubucucike

g / cm ³

3.21

Gukomera

Vickers gukomera

2500

Ingano y'ibinyampeke

μm

2 ~ 10

Ubuziranenge bwa Shimi

%

99.99995

Ubushyuhe

J · kg-1 · K-1

640

Ubushyuhe bwo hejuru

2700

Imbaraga zidasanzwe

MPa (RT-amanota 4)

415

Umusore Modulus

Gpa (4pt yunamye, 1300 ℃)

430

Kwagura Ubushyuhe (CTE)

10-6K-1

4.5

Amashanyarazi

(W / mK)

300


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