Semicera's 4 Inch High Pure Semi-Insulating (HPSI) SiC Double-impande ebyiri Zogejwe Wafer Substrates zakozwe kugirango zuzuze ibisabwa ninganda zikoresha amashanyarazi. Izi nteruro zakozwe hamwe nuburinganire budasanzwe nubuziranenge, bitanga urubuga rwiza kubikoresho bya elegitoroniki bigezweho.
Iyi wafer ya HPSI SiC itandukanijwe nubushobozi bwayo bwo hejuru bwumuriro hamwe nubushakashatsi bwumuriro wamashanyarazi, bigatuma bahitamo neza kumurongo mwinshi kandi ufite ingufu nyinshi. Impande zombi zo gusya zituma habaho ubuso buto, ni ngombwa mu kuzamura imikorere yibikoresho no kuramba.
Isuku ryinshi rya Wafers ya Siicera ya Semicera igabanya inenge n’umwanda, biganisha ku gipimo cy’umusaruro mwinshi no kwizerwa ku bikoresho. Izi substrate zirakwiriye muburyo butandukanye bwa porogaramu, zirimo ibikoresho bya microwave, ibikoresho bya elegitoroniki, hamwe na tekinoroji ya LED, aho ari ngombwa kandi biramba.
Hamwe no kwibanda ku guhanga udushya no mu bwiza, Semicera ikoresha tekinoroji yo gukora mu rwego rwo gukora wafer yujuje ibyangombwa bisabwa bya elegitoroniki igezweho. Kuringaniza impande zombi ntabwo byongera imbaraga za mashini gusa ahubwo binorohereza guhuza neza nibindi bikoresho bya semiconductor.
Muguhitamo Semicera's 4 Inch High Purity Semi-Insulating HPSI SiC Double-side Polised Wafer Substrates, abayikora barashobora gukoresha inyungu zogukoresha imicungire yumuriro hamwe nogukoresha amashanyarazi, bigatanga inzira yiterambere ryibikoresho bya elegitoroniki bikora neza kandi bikomeye. Semicera ikomeje kuyobora inganda ziyemeje guteza imbere ubuziranenge n'ikoranabuhanga.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
