Semicera's 4 ”6” Ubuziranenge Bwinshi Semi-Insulating SiC Ingots yagenewe kubahiriza ibipimo nyabyo byinganda ziciriritse. Izi nganda zakozwe hibandwa ku kweza no guhuzagurika, bigatuma bahitamo neza kubububasha bukomeye kandi bwihuse cyane aho imikorere ari iyambere.
Imiterere yihariye yibi bikoresho bya SiC, harimo nubushyuhe bukabije bwumuriro hamwe n’amashanyarazi meza cyane, bituma bikwiranye cyane cyane no gukoresha ibikoresho bya elegitoroniki n’ibikoresho bya microwave. Kamere yabyo itanga uburyo bwo gukwirakwiza ubushyuhe no kugabanya amashanyarazi make, biganisha kubintu byiza kandi byizewe.
Semicera ikoresha uburyo bugezweho bwo gukora inganda kugirango ikore ingots zifite ubuziranenge bwa kristu kandi bumwe. Ubu busobanuro bwerekana neza ko buri ingot ishobora gukoreshwa neza mubikorwa byoroshye, nkibikoresho byongera imbaraga nyinshi, diode ya laser, nibindi bikoresho bya optoelectronic.
Biboneka mubunini bwa santimetero 4 na santimetero 6, Inganda za SiC ya Semicera zitanga ihinduka rikenewe ku munzani utandukanye w’ibikorwa ndetse n’ibisabwa mu ikoranabuhanga. Haba ubushakashatsi niterambere cyangwa umusaruro mwinshi, izo ingots zitanga imikorere nigihe kirekire sisitemu ya elegitoroniki igezweho isaba.
Muguhitamo Semicera's Purity Semi-Insulating SiC Ingots, uba ushora imari mubicuruzwa bihuza siyanse yibikoresho bigezweho hamwe nubuhanga bwo gukora butagereranywa. Semicera yitangiye gushyigikira udushya no kuzamuka kwinganda ziciriritse, zitanga ibikoresho bifasha iterambere ryibikoresho bya elegitoroniki bigezweho.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
