Semicera ya 6 Inch N yo mu bwoko bwa SiC Wafer ihagaze ku isonga rya tekinoroji ya semiconductor. Yakozwe kugirango ikore neza, iyi wafer irusha imbaraga imbaraga nyinshi, inshuro nyinshi, hamwe nubushyuhe bwo hejuru, byingenzi kubikoresho bya elegitoroniki bigezweho.
Ibikoresho byacu 6 Inch N ubwoko bwa SiC wafer biranga moteri ya elegitoronike nini kandi ikananirwa kurwanya, ibyo bikaba aribintu byingenzi kubikoresho byamashanyarazi nka MOSFETs, diode, nibindi bice. Iyi miterere ituma ingufu zihinduka neza kandi bikagabanya kubyara ubushyuhe, byongera imikorere nubuzima bwa sisitemu ya elegitoroniki.
Uburyo bukomeye bwo kugenzura ubuziranenge bwa Semicera bwemeza ko buri wafer ya SiC igumana ubuso buhebuje kandi bufite inenge nke. Uku kwitondera neza birambuye byemeza ko wafer yacu yujuje ibyangombwa bisabwa byinganda nkimodoka, icyogajuru, nitumanaho.
Usibye ibikoresho byamashanyarazi bisumba byose, N-ubwoko bwa SiC wafer itanga ubushyuhe bukomeye bwumuriro no kurwanya ubushyuhe bwinshi, bigatuma biba byiza mubidukikije aho ibikoresho bisanzwe bishobora kunanirwa. Ubu bushobozi bufite agaciro cyane mubisabwa birimo imirongo myinshi-nimbaraga nyinshi.
Muguhitamo Semicera ya 6 Inch N yo mu bwoko bwa SiC Wafer, uba ushora imari mubicuruzwa byerekana urwego rwo hejuru rwo guhanga udushya. Twiyemeje gutanga inyubako zubaka ibikoresho bigezweho, tukareba ko abafatanyabikorwa bacu mu nganda zitandukanye babona ibikoresho byiza byiterambere ryiterambere ryikoranabuhanga.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
