Semicera's 6 Inch Semi-Insulating HPSI SiC Wafers yateguwe kugirango ihuze ibyifuzo bikenerwa na tekinoroji ya kijyambere. Hamwe nubuziranenge budasanzwe no guhuzagurika, iyi wafer ikora nk'urufatiro rwizewe rwo guteza imbere ibikoresho bya elegitoroniki bikora neza.
Iyi wafer ya HPSI SiC izwiho kuba ifite ingufu zidasanzwe zogukoresha amashanyarazi hamwe n’amashanyarazi, zikaba ari ingenzi cyane mu kunoza imikorere y’ibikoresho by’amashanyarazi n’umuzunguruko mwinshi. Ibikoresho bya kimwe cya kabiri bifasha mukugabanya amashanyarazi no kugabanya ibikoresho neza.
Inzira nziza yo gukora ikoreshwa na Semicera yemeza ko buri wafer ifite ubunini bumwe nubusembwa buke. Ubu busobanuro nibyingenzi mubikorwa byiterambere nkibikoresho bya radiyo yumurongo wa radiyo, inverteri yingufu, hamwe na sisitemu ya LED, aho imikorere nigihe kirekire aribintu byingenzi.
Mugukoresha tekinoroji yubuhanga bugezweho, Semicera itanga wafer itujuje gusa ariko irenze ibipimo byinganda. Ingano ya santimetero 6 itanga ubworoherane mu kongera umusaruro, igatanga ubushakashatsi ndetse n’ubucuruzi bukoreshwa mu gice cya kabiri.
Guhitamo Semicera ya 6 Inch Semi-Insulating HPSI SiC Wafers bisobanura gushora imari mubicuruzwa bitanga ubuziranenge nibikorwa. Iyi wafer ni kimwe mubyo Semicera yiyemeje guteza imbere ubushobozi bwikoranabuhanga rya semiconductor binyuze mubikoresho bishya hamwe nubukorikori bwitondewe.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
