6 lnch n-ubwoko bwa sic substrate

Ibisobanuro bigufi:

6-santimetero n-ubwoko bwa SiC substrate‌ ni ibikoresho bya semiconductor birangwa no gukoresha ubunini bwa wafer ya santimetero 6, byongera umubare wibikoresho bishobora gukorerwa kuri wafer imwe hejuru yubuso bunini, bityo bikagabanya ibiciro byurwego rwibikoresho . Iterambere nogukoresha bya santimetero 6 n-ubwoko bwa SiC substrate byungukiwe no guteza imbere ikoranabuhanga nkuburyo bwo gukura kwa RAF, bigabanya kwimurwa mugukata kristu hamwe na disikuru hamwe no kugereranya kristu, bityo bikazamura ubwiza bwa substrate. Ikoreshwa ryiyi substrate ningirakamaro cyane mugutezimbere umusaruro no kugabanya ibiciro byibikoresho byamashanyarazi bya SiC.


Ibicuruzwa birambuye

Ibicuruzwa

Carbide ya Silicon (SiC) ibikoresho bya kirisiti imwe ifite ubugari bunini bwikigero kinini (~ Si inshuro 3), ubushyuhe bwinshi bwo hejuru (~ Si inshuro 3.3 cyangwa GaAs inshuro 10), umuvuduko mwinshi wimuka wa electron (~ Si inshuro 2,5), amashanyarazi menshi yameneka umurima (~ Si inshuro 10 cyangwa GaAs inshuro 5) nibindi biranga ibintu byiza.

Igisekuru cya gatatu ibikoresho bya semiconductor birimo cyane cyane SiC, GaN, diyama, nibindi, kubera ko ubugari bwacyo bwagutse (Eg) burenze cyangwa bungana na volt ya electron ya 2.3 (eV), izwi kandi nkibikoresho bigari bya semiconductor. Ugereranije n’ibikoresho bya semiconductor yo mu gisekuru cya mbere n’icya kabiri, ibikoresho bya semiconductor yo mu gisekuru cya gatatu bifite ibyiza byo gutwara amashanyarazi menshi, umurima w'amashanyarazi wangiritse cyane, umuvuduko mwinshi wimuka wa electron hamwe ningufu nyinshi zihuza, zishobora kuzuza ibisabwa bishya byikoranabuhanga rya kijyambere rya kijyambere kuri byinshi ubushyuhe, imbaraga nyinshi, umuvuduko mwinshi, inshuro nyinshi hamwe no kurwanya imirasire nibindi bihe bibi. Ifite ibyifuzo byingenzi byokurikizwa mubijyanye no kurinda igihugu, indege, ikirere, ubushakashatsi bwa peteroli, kubika optique, nibindi, kandi birashobora kugabanya igihombo cyingufu zirenga 50% mubikorwa byinshi byingenzi nkitumanaho ryagutse, ingufu zizuba, inganda zikora imodoka, itara rya semiconductor, hamwe na gride yubwenge, kandi irashobora kugabanya ingano yibikoresho hejuru ya 75%, ibyo bikaba bifite akamaro kanini mugutezimbere ubumenyi bwikoranabuhanga.

Ingufu za Semicera zirashobora guha abakiriya uburyo bwiza bwo kuyobora (Conductive), Semi-insulation (Semi-insulation), HPSI (High Purity semi-insulating) silicon karbide substrate; Mubyongeyeho, turashobora guha abakiriya impapuro za silicon karbide epitaxial; Turashobora kandi guhitamo urupapuro rwa epitaxial dukurikije ibyo abakiriya bakeneye bakeneye, kandi nta mubare muto wateganijwe.

UMWANZURO W'INGENZI

Ingano 6-cm
Diameter 150.0mm + 0mm / -0.2mm
Icyerekezo cy'ubuso hanze-axis: 4 ° yerekeza kuri <1120> ± 0.5 °
Uburebure bwibanze 47.5mm1.5 mm
Icyerekezo Cyibanze <1120> ± 1.0 °
Icyiciro cya kabiri Nta na kimwe
Umubyimba 350.0um ± 25.0um
Polytype 4H
Ubwoko bw'imyitwarire n-Ubwoko

UMWITOZO W'IMYITOZO

6-cm
Ingingo Icyiciro cya P-MOS Icyiciro cya P-SBD
Kurwanya 0.015Ω · cm-0.025Ω · cm
Polytype Nta n'umwe wemerewe
Ubucucike bwa Micropipe ≤0.2 / cm2 ≤0.5 / cm2
EPD 0004000 / cm2 0008000 / cm2
TED 0003000 / cm2 0006000 / cm2
BPD 0001000 / cm2 0002000 / cm2
TSD 00300 / cm2 0001000 / cm2
SF (Yapimwe naUV-PL-355nm) Agace ka 0.5% ≤1%
Isahani ya hex n'umucyo mwinshi Nta n'umwe wemerewe
Amashusho ya Carbone Yerekanwa numucyo mwinshi Cumulativearea≤0.05%
微 信 截图 _20240822105943

Kurwanya

Polytype

6 lnch n-ubwoko bwa sic substrate (3)
6 lnch n-ubwoko bwa sic substrate (4)

BPD & TSD

6 lnch n-ubwoko bwa sic substrate (5)
SiC wafers

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