6 '' Wafer Carrier ya Aixtron G5 na Semicera yateguwe kugirango ihuze ibisabwa bikenewe muburyo bwo gukura kwa epitaxial muri sisitemu ya Aixtron G5. Yubatswe hamwe na grafite nziza-nziza, iyiwaferihamye ituze hamwe nuburinganire mugihe cyaCVDnaInzira ya MOCVD, gushoboza gushira neza muri epi reaction.
Hamwe nasilicon carbide ceramicgutwikira, 6 '' Wafer Carrier ya Aixtron G5 itanga uburebure bwigihe kirekire hamwe nubushyuhe bwumuriro, bigatuma biba byiza mubushyuhe bwo hejuru murwego rwo gukura epitaxial. Iki gicuruzwa cyakozwe kugirango gishyigikire nezawafergutunganya no gukora cyane mubikorwa bya semiconductor.
Muri Semicera, twibanze ku gutanga ibisubizo byo hejuru-byinganda zinganda. Abatwara wafer yacu yubatswe kubwizerwa, itanga imikorere myiza muri sisitemu ya Aixtron G5 nibindiIndwara ya CVDreaction. Waba ukorana na karubide ya silicon cyangwa ibindi bikoresho, iyi transport ya wafer iremeza neza kandi ihamye ikenewe mu gukora inganda ziciriritse.
Ibintu by'ingenzi:
• Gukwirakwiza sisitemu ya Aixtron G5 hamwe nubundi buryo bwa CVD MOCVD.
• Igicapo cyiza cya grafite susceptor hamwe na silicon karbide ceramic coating kugirango irambe neza.
• Ibyiza kubikorwa byo gukura epitaxial bisaba neza kandi bihamye.
• Gukoresha wafer yizewe mubidukikije bigoye.
Semicera yitangiye gutanga ibisubizo bigezweho, iremeza ko buri 6 '' Wafer Carrier yujuje ibipimo bihanitse kubyo ukeneye epitaxy.
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