ALD Atomic Layer Kubitsa Umubumbe wa Susceptor

Ibisobanuro bigufi:

ALD Atomic Layer Deposition Planetary Susceptor na Semicera yagenewe kubikwa neza kandi byuzuye bya firime yoroheje mubikorwa bya semiconductor. Ubwubatsi bukomeye hamwe nibikoresho bigezweho byemeza imikorere myiza no kuramba. Semicera ya susceptor yongerera ubwiza bwo kubika no gukora neza, bigatuma iba ikintu cyingenzi mugukoresha ALD igezweho.

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Ibicuruzwa birambuye

Ibicuruzwa

Ububiko bwa Atomic layer (ALD) nubuhanga bwo kubika imyuka ya chimique ikura firime yoroheje murwego rumwe muguhindura inshinge ebyiri cyangwa nyinshi za precursor. ALD ifite ibyiza byo kugenzurwa cyane no guhuza, kandi irashobora gukoreshwa cyane mubikoresho bya semiconductor, ibikoresho bya optoelectronic, ibikoresho byo kubika ingufu nizindi nzego. Amahame shingiro ya ALD arimo prursor adsorption, reaction yo hejuru no kuvanaho ibicuruzwa, kandi ibikoresho byinshi birashobora gushirwaho mugusubiramo izi ntambwe mukuzenguruka. ALD ifite ibiranga nibyiza byo kugenzurwa cyane, uburinganire, hamwe nuburyo budahwitse, kandi birashobora gukoreshwa mugushira ibikoresho bitandukanye byubutaka nibikoresho bitandukanye.

ALD Atomic Layer Deposition Umubumbe wa Susceptor (1)

ALD ifite ibiranga ibyiza n'ibikurikira:
1. Igenzurwa cyane:Kubera ko ALD ari intambwe yo gukura kumurongo, ubunini nuburinganire bwa buri cyiciro cyibikoresho birashobora kugenzurwa neza.
2. Guhuriza hamwe:ALD irashobora kubika ibikoresho kimwe hejuru yubutaka bwose, ikirinda ubusumbane bushobora kugaragara mubindi buhanga bwo kubika.
3. Imiterere idahwitse:Kubera ko ALD ishyizwe mubice bya atome imwe cyangwa molekile imwe, firime yavuyemo mubisanzwe ifite imiterere yuzuye, idahwitse.
4. Imikorere myiza yo gukwirakwiza:ALD irashobora gutwikira neza ibipimo bigereranijwe, nka nanopore array, ibikoresho byinshi, nibindi.
5. Ubunini:ALD irashobora gukoreshwa mubikoresho bitandukanye bya substrate, harimo ibyuma, semiconductor, ikirahure, nibindi.
6. Guhindagurika:Muguhitamo molekules zinyuranye, ibikoresho bitandukanye birashobora kubikwa mubikorwa bya ALD, nka okiside yicyuma, sulfide, nitride, nibindi.