AlN Heater by semicera nigisubizo cyiza cyo gushyushya cyakozwe muri ceramic ya aluminium nitride, yagenewe gukoreshwa cyane mubikorwa byinganda nka semiconductor, sisitemu ya vacuum, nibindi byinshi. Ubushuhe budasanzwe bwumuriro hamwe nubushyuhe bwamashanyarazi bituma biba byiza gushyushya neza mubidukikije bisaba gutunganya wafer, ibyuka bya vacuum, hamwe nimashini zisohora.
Muri semicera, twishimiye gutanga ibicuruzwa byo mu rwego rwo hejuru byujuje inganda zikenewe, kandi AlN Heater nayo ntisanzwe. Yakozwe muri nitride ya aluminium (AlN), iyi shyushya itanga ubushyuhe buhebuje, kwaguka kwinshi kwubushyuhe, hamwe nubushobozi bwo guhangana nubushyuhe bukabije bitabangamiye imikorere. Gukwirakwiza neza kwubushuhe bituma bikenerwa mubikorwa bikomeye nko kubika imyuka ya chimique (CVD) nibindi bikoresho byoroshye.
Byongeye kandi, AlN Heater iratunganye cyane kugirango yinjire muri hoteri ya wafer hamwe na vacuum evaporator, bituma iba igisubizo cyinshi kubakora inganda bashingira kubintu bishyushye bihoraho. Hamwe na nitride ya aluminiyumu hamwe na nitride yuzuye yo kubaka aluminiyumu, umushyushya wubatswe kubwigihe kirekire cyo kwizerwa no kugenzura neza ubushyuhe.
Niba ushaka ibisubizo bya nitride ya AlN aluminium iruta iyindi igihe kirekire kandi ikora neza, semicera itanga amahitamo yizewe muri AlN Heater. Ubushyuhe bugezweho bwa ceramic bushyigikira tekinoroji igezweho mubikorwa bya CVD, gusohora, hamwe nizindi porogaramu zikoresha igice, bifasha kugumana ubusugire bwibikorwa mubushyuhe bwo hejuru.
