Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Impeta ya tantalum ya karbide yatunganijwe ni ibicuruzwa byimpeta byakozwe kugiti cyabyo kandi bigakorwa hifashishijwe ikoranabuhanga rya tantalum karbide rishingiye kubisabwa byihariye nibisabwa kubakiriya.
Ibikurikira nubusobanuro rusange bwa tantalum karbide yatunganijwe impeta:
1. Guhitamo ibikoresho: Ukurikije ibyo abakiriya bakeneye, ibikoresho bya tantalum bifite isuku-byinshi byatoranijwe nka substrate kugirango hamenyekane ubuziranenge n’imikorere yibicuruzwa.
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3. Uburyo bwo gutwika karubide ya Tantalum: Ubuso bwimpeta ya tantalum buvurwa hifashishijwe uburyo bwa tantalum bwa karbide yabigize umwuga kugirango habeho umwenda wuzuye, wuzuye kandi ufatanye neza wa karubide ya tantalum.
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5. Igikorwa cyo gufunga kashe: Ukurikije ibisabwa byashyizweho umukiriya, imiterere yikimenyetso cya tantalum karbide yometseho impeta yateguwe kandi ikorwa kugirango ikore neza kandi ikingire gaze cyangwa amazi.
6. Kugenzura ubuziranenge: Mugihe cyibikorwa byihariye, kugenzura ubuziranenge no kugerageza birakorwa kugirango ibicuruzwa bihamye, byizewe kandi byubahirizwe.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hariburorero bumwebumwe bwintangarugero:
