Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Hamwe na waferi ya silikoni 8 ya karubide (SiC), ibisabwa mubikorwa bitandukanye bya semiconductor byarushijeho gukomera, cyane cyane mubikorwa bya epitaxy aho ubushyuhe bushobora kurenga dogere selisiyusi 2000. Ibikoresho bya susceptor gakondo, nka grafite yashizwemo na karubide ya silicon, bikunda kugabanuka kuri ubu bushyuhe bwinshi, bigahagarika inzira ya epitaxy. Nyamara, CVD tantalum karbide (TaC) ikemura neza iki kibazo, hamwe nubushyuhe bugera kuri dogere selisiyusi 2300 kandi bitanga ubuzima burambye. Menyesha Semicera 's CVD Tantalum Carbide Yashizwe hejuru Igice cya kabirigushakisha byinshi kubyerekeye ibisubizo byateye imbere.
Nyuma yimyaka yiterambere, Semicera yatsinze ikoranabuhanga ryaCVD TaCn'imbaraga zihuriweho n'ishami R&D. Inenge ziroroshye kugaragara mugikorwa cyo gukura kwa waC waferi, ariko nyuma yo kuyikoreshaTaC, itandukaniro ni ngombwa. Hasi ni igereranya rya wafers hamwe na TaC, kimwe na Simicera ibice byo gukura kwa kristu imwe.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hariburorero bumwebumwe bwintangarugero:
TaC yatwikiriye susceptor
Igishushanyo hamwe na TaC yubatswe
