Ikirangantego cya Fused Quartz cyo muri Semicera cyakozwe muburyo bwitondewe kugirango gitange inkunga itagereranywa kandi ihamye mubikorwa bitandukanye byubushyuhe bwo hejuru. Byashizweho kuvakwiza kwinshi, iyi pedeste iratunganye kubikorwa bya semiconductor, harimo no gukwirakwizawaferinzira na LPCVD. Kurwanya ubushyuhe budasanzwe hamwe nigihe kirekire cyimiti bituma ihitamo neza kubidukikije bisaba.
Muri Semicera, dushyira imbere ubuziranenge, tukareba ko ibicuruzwa byikirahure bya quartz byahujwe byujuje ubuziranenge. Ikirangantego cya quartz cyahujwe ntabwo cyongera imikorere gusa ahubwo gitanga igisubizo cyigiciro kubashaka amahitamo ya silika yizewe yizewe. Waba ubikeneye kuri semiconductor quartz ya progaramu cyangwa ubundi buryo bwihariye bukoreshwa, pedestal yacu iragaragara kubiramba kandi neza.
Ibyiza bya Fused Quartz Ibikoresho
1.Kurwanya Ubushyuhe Bwinshi
Ikiraro cya Fused Quartz gifite ahantu horoheje nko kuri 1730 ° C, bituma gishobora kwihanganira ikoreshwa igihe kirekire ku bushyuhe buri hagati ya 1100 ° C na 1250 ° C. Byongeye kandi, irashobora kwihanganira guhura nigihe gito nubushyuhe bugera kuri 1450 ° C.
2. Kurwanya ruswa
Fused Quartz Pedestal yinjizwamo imiti muri acide nyinshi, usibye aside hydrofluoric. Kurwanya aside iruta iy'ububumbyi inshuro 30 naho ibyuma bitagira umwanda inshuro 150. Ku bushyuhe bwo hejuru, nta bindi bikoresho bishobora guhuza imiti ya quartz yahujwe, bigatuma ihitamo neza ibidukikije bikabije.
3. Guhagarara neza
Kimwe mu bintu bigaragara biranga Fused Quartz Pedestal ni coefficente ntoya yo kwagura ubushyuhe. Uyu mutungo uyemerera kwihanganira ihindagurika ryubushyuhe bukabije nta gucika. Kurugero, irashobora gushyuha byihuse kugeza kuri 1100 ° C hanyuma ikinjizwa mumazi mubushyuhe bwicyumba nta byangiritse - ikintu cyingenzi kiranga ibikorwa byo gukora cyane.
