Graphite Susceptor hamwe na Silicon Carbide Coating ibice 6 santimetero 6 wafer

Igishushanyo cya Graphite hamweSilicon Carbide Coating, Ibice 66 wafer waferkuva muri semicera itanga uburebure budasanzwe hamwe nubushuhe bwumuriro kubikorwa byo hejuru byimikorere ya epitaxial. Semicera kabuhariwe muri susceptors zateye imbere zagenewe kuzamura inzira nkaSi EpitaxynaSiC Epitaxy, kwemeza imikorere yizewe mugusaba ibidukikije bya semiconductor.

Iyi susceptor yakozwe muburyo bwihariye bwo gukoresha hamweMOCVDsisitemu kandi itanga guhuza nabatwara ibintu bitandukanye nka PSS Etching Carrier, ICP Etching Carrier, na RTP. Nibyiza kubikorwa bya Monocrystalline Silicon hamwe na LED Epitaxial Susceptor yashizeho, itanga ibintu byinshi muburyo butandukanye, harimo Barrel Susceptor na Pancake Susceptor.

Graphite Susceptor hamwe na Silicon Carbide Coating nayo ishyigikira porogaramu murwego rwingufu zizuba binyuze muguhuza ibice bya Photovoltaic hamwe nibyiza muri GaN kubikorwa bya SiC Epitaxy. Ubushobozi bwacyo bwa santimetero 6 ya wafer butuma ibicuruzwa byinjira cyane, bikaba igikoresho cyingenzi kubakora inganda zikoresha amashanyarazi hamwe n’inganda zifotora.