Isuku ryinshi SiC Utwara / Susceptor

Isuku ryinshi SiC Umwikorezi / Susceptor Ishusho Yerekanwe

Ibisobanuro bigufi:

Silicon carbide ifite disikuru izwi kandi nka SIC tray, silicon carbide etching, disiki ya ICP. Silicon karbide tray ya LED yogukoresha (SiC tray) 00600mm nigikoresho cyihariye cyo guteramo silicon yimbitse (imashini ya ICP).

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Ibisobanuro

Silicon carbide ceramics ifite ibikoresho byiza byubukanishi mubushyuhe bwicyumba, nkimbaraga nyinshi, ubukana bwinshi, modulus yo mu bwoko bwa elastike, nibindi. imikorere yo gutunganya.
Birakenewe cyane cyane kubyara ibice bya ceramic byuzuye mubikoresho byumuzunguruko byuzuzanya nkimashini za lithographie, zikoreshwa cyane cyane mu gukora ubwikorezi bwa SiC / susceptor, ubwato bwa wafer bwa SiC, disiki yonsa, isahani ikonjesha amazi, ibipimo byerekana neza ibyuma byerekana, gusya hamwe nibindi bice byubatswe byubutaka

umwikorezi2

umwikorezi3

umwikorezi4

Ibyiza

Kurwanya ubushyuhe bwinshi: gukoresha bisanzwe kuri 1800 ℃
Ubushyuhe bwo hejuru cyane: bihwanye nibikoresho bya grafite
Gukomera cyane: gukomera kumwanya wa kabiri nyuma ya diyama, nitride ya boron
Kurwanya ruswa: aside ikomeye na alkali nta ruswa ifite kuri yo, kurwanya ruswa biruta karbide ya tungsten na alumina
Uburemere bworoshye: ubucucike buke, hafi ya aluminium
Nta guhindagurika: coefficient nkeya yo kwagura ubushyuhe
Kurwanya ubushyuhe bwumuriro: irashobora kwihanganira ihindagurika ryubushyuhe bukabije, irwanya ihungabana ryumuriro, kandi ifite imikorere ihamye
Silicon carbide itwara nka sic etching itwara, ICP etching susceptor, ikoreshwa cyane muri semiconductor CVD, vacuum sputtering nibindi. Turashobora guha abakiriya ibicuruzwa bya wafer byabigenewe bya silicon nibikoresho bya karubide kugirango tubone ibyifuzo bitandukanye.

Ibyiza

Umutungo	Agaciro	Uburyo
Ubucucike	3.21 g / cc	Kurohama-kureremba hamwe nubunini
Ubushyuhe bwihariye	0,66 J / g ° K.	Flash flash
Imbaraga zoroshye	450 MPa 560 MPa	Ingingo 4 yunamye, RT4 igoramye, 1300 °
Gukomera kuvunika	2.94 MPa m1 / 2	Microindentation
Gukomera	2800	Vicker, umutwaro wa 500g
Modulus Yumusore Modulus	450 GPa430 GPa	4 pt yunamye, RT4 yunamye, 1300 ° C.
Ingano y'ibinyampeke	2 - 10 µm	SEM

Umwirondoro w'isosiyete

WeiTai Energy Technology Co., Ltd nisoko ritanga amasoko meza ya semiconductor ceramics kandi rukaba rukora uruganda rukumbi mu Bushinwa rushobora icyarimwe gutanga icyarimwe cyiza cya silicon karbide ceramic (cyane cyane Recrystallized SiC) hamwe na CVD SiC. Mubyongeyeho, isosiyete yacu yiyemeje kandi mumirima yubutaka nka alumina, nitride ya aluminium, zirconi, na nitride ya silicon, nibindi.

Ibicuruzwa byacu byingenzi birimo: silicon carbide etching disiki, ubwato bwa silicon karbide, ubwato bwa silicon karbide wafer (Photovoltaic & Semiconductor), itanura ya carbide itanura, silikoni karbide cantilever, amashanyarazi ya karuboni, hamwe na CVD SiC hamwe na TaC gutwikira. Ibicuruzwa bikoreshwa cyane cyane munganda za semiconductor ninganda zifotora, nkibikoresho byo gukura kristu, epitaxy, etching, gupakira, gutwikira no gutwika itanura, nibindi.
hafi (2)