Hamwe na SemiceraInP na CdTe Substrate, urashobora kwitega ubuziranenge kandi busobanutse neza kugirango uhuze ibikenewe mubikorwa byawe byo gukora. Haba kubikoresho bifotora cyangwa ibikoresho bya semiconductor, substrate zacu zakozwe kugirango tumenye neza imikorere, iramba, kandi ihamye. Nkumuntu utanga isoko ryizewe, Semicera yiyemeje gutanga ibisubizo byujuje ubuziranenge, byigenga byifashishwa mu guhanga udushya mu bikoresho bya elegitoroniki n’ingufu zishobora kongera ingufu.
Crystalline hamwe nu mashanyarazi✽1
Andika | Dopant | EPD (cm–2Below Reba hepfo A.) | DF (Yuzuye Ubusa) agace (cm2, Reba hepfo B.) | c / (c cm–3) | Mobilit (y cm2/ Vs) | Kurwanya (y Ω・ cm) |
n | Sn | ≦ 5 × 104 ≦ 1 × 104 ≦ 5 × 103 | ────── | (0.5〜6) × 1018 | ────── | ────── |
n | S | ────── | ≧ 10 (59.4%) ≧ 15 (87%). 4 | (2〜10) × 1018 | ────── | ────── |
p | Zn | ────── | ≧ 10 (59.4%) ≧ 15 (87%). | 〜 3〜6) × 1018 | ────── | ────── |
SI | Fe | ≦ 5 × 104 ≦ 1 × 104 | ────── | ────── | ────── | ≧ 1 × 106 |
n | nta na kimwe | ≦ 5 × 104 | ────── | ≦ 1 × 1016 | ≧ 4 × 103 | ────── |
✽1 Ibindi bisobanuro birahari bisabwe.
A.13 Impuzandengo
1. Dislocation etch umwobo wapimye ku manota 13.
2. Agace karemereye impuzandengo yubucucike bwa dislocation irabaze.
Ibipimo by'akarere B.DF (Mugihe cy'ingwate y'akarere)
1. Dislocation etch pit ubucucike bwamanota 69 yerekanwe nkiburyo burabarurwa.
2. DF isobanurwa nka EPD munsi ya 500cm–2
3. Agace ntarengwa DF gapimwe nubu buryo ni 17.25cm2
InP Imirongo imwe ya Crystal Substrates Ibisanzwe
1. Icyerekezo
Icyerekezo cy'ubuso (100) ± 0.2º cyangwa (100) ± 0.05º
Surface off icyerekezo irahari bisabwe.
Icyerekezo cya etage ya: (011) ± 1º cyangwa (011) ± 0.1º NIBA: (011) ± 2º
Cleaved OF irahari bisabwe.
2. Ikimenyetso cya Laser gishingiye ku gipimo cya SEMI kirahari.
3. Porogaramu yumuntu ku giti cye, kimwe na paki muri gaze ya N2 irahari.
4. Etch-na-paki muri gaze ya N2 irahari.
5. Waferi y'urukiramende irahari.
Hejuru y'ibisobanuro ni ibya JX 'bisanzwe.
Niba ibindi bisobanuro bisabwa, nyamuneka utubaze.
Icyerekezo