Isostatike PECVD Ubwato bwa Graphite

Isostatike PECVD Graphite Ubwato Bwerekana Ishusho

Ibisobanuro bigufi:

Ubwato bwa Isostatike PECVD bukoreshwa cyane muburyo butandukanye bwo gukora semiconductor, nko kubika firime polysilicon, kubika firime ya okiside, kubika nitride, nibindi. Imikorere yayo myiza ituma itwara wafer nziza mubikorwa bya PECVD.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

SEMICERA isostatike ya PECVD ubwato bwa grafite ni isuku ryinshi, rifite ubucucike bwinshi bwa grafite igenewe gushyigikirwa na wafer muri gahunda ya PECVD (plasma yongerewe imbaraga za pompe ziva mumashanyarazi). SEMICERA ikoresha tekinoroji yo gukanda isostatike kugirango yizere ko ubwato bwa grafite bufite ubushyuhe buhebuje bwo guhangana nubushyuhe bwo hejuru, kurwanya ruswa, guhagarara neza hamwe nubushuhe bwiza bwumuriro, ibyo bikaba ari ingirakamaro cyane mugikorwa cyo gukora igice cya kabiri.

SEMICERA isostatike PECVD ubwato bwa grafite ifite ibyiza bikurikira:

Isuku ryinshi: Ibikoresho bya grafite bifite isuku nyinshi nibirimo umwanda muke kugirango wirinde kwanduza ubuso bwa wafer.

Ens Ubucucike bukabije: Ubucucike bukabije, imbaraga za mashini nyinshi, burashobora kwihanganira ubushyuhe bwinshi hamwe n’ibidukikije byinshi.

Stability Iterambere ryiza: Guhindura ibipimo bito ku bushyuhe bwo hejuru kugirango inzira ihamye.

Conduct Ubushuhe buhebuje bwumuriro: Hindura neza ubushyuhe kugirango wirinde ubushyuhe bwa wafer.

Resistance Kurwanya ruswa ikomeye: Ashoboye kurwanya isuri imyuka itandukanye yangiza na plasma.

Ibipimo by'imikorere	semicera	SGL R6510	Ibipimo by'imikorere
Ubucucike bwinshi (g / cm3)	1.91	1.83	1.85
Imbaraga zunama (MPa)	63	60	49
Imbaraga zo guhonyora (MPa)	135	130	103
Gukomera ku nkombe (HS)	70	64	60
Coefficient yo kwagura ubushyuhe （10-6 / K）	85	105	130
Coefficient yo kwagura ubushyuhe （10-6 / K）	5.85	4.2	5.0
Kurwanya (μΩm)	11-13	13	10

Ibyiza byo kuduhitamo:
Selection Guhitamo ibikoresho: Ibikoresho bya grafite byera cyane bikoreshwa kugirango ibicuruzwa bibe byiza.
Technology Gutunganya tekinoroji: Gukanda Isostatike bikoreshwa kugirango ibicuruzwa byuzuzanye kandi bihuze.
▪ Ingano yihariye: Ubwato bwa Graphite bwubunini nubunini butandukanye burashobora gutegurwa ukurikije ibyo abakiriya bakeneye.
Treatment Ubuvuzi bwo hejuru: Hatanzwe uburyo butandukanye bwo kuvura hejuru, nko gutwika silicon karbide, nitride ya boron, nibindi, kugirango byuzuze ibisabwa bitandukanye.