MOCVD Susceptor yo Gukura Epitaxial

MOCVD Susceptor yo Kwiyongera kwa Epitaxial na semicera, igisubizo cyambere cyagenewe kunoza gahunda yo gukura epitaxial kubikorwa byiterambere rya semiconductor. Semicera ya MOCVD Susceptor ituma igenzura neza ubushyuhe nubushyuhe bwibintu, bikaba ihitamo ryiza ryo kugera kuri Si Epitaxy nziza na SiC Epitaxy. Ubwubatsi bwayo bukomeye hamwe nubushyuhe bwo hejuru bwumuriro butuma imikorere ihoraho mubidukikije bisaba, byemeza ubwizerwe bukenewe muri sisitemu yo gukura epitaxial.

Iyi MOCVD Susceptor irahuza nibikorwa bitandukanye bya epitaxial, harimo umusaruro wa Monocrystalline Silicon hamwe no gukura kwa GaN kuri SiC Epitaxy, bigatuma iba ikintu cyingenzi kubakora ibicuruzwa bashaka ibisubizo byo murwego rwo hejuru. Byongeye kandi, ikorana na PSS Etching Carrier, ICP Etching Carrier, hamwe na sisitemu ya RTP, byongera imikorere nibikorwa. Susceptor irakenewe kandi kuri LED Epitaxial Susceptor ikoreshwa hamwe nubundi buryo bugezweho bwo gukora semiconductor.

Hamwe nigishushanyo cyayo kinini, septora ya MOCVD ya semicera irashobora guhuzwa kugirango ikoreshwe muri Pancake Susceptors na Barrel Susceptors, itanga ibintu byoroshye mubikorwa bitandukanye. Kwishyira hamwe kw'ibice bya Photovoltaque birusheho kwagura imikoreshereze yabyo, bituma biba byiza haba mu gice cya kabiri cy’inganda n’izuba. Iki gisubizo cyiza cyane gitanga ubushyuhe buhebuje kandi burambye, butanga umusaruro muremure mugihe cyo gukura epitaxial.