Semicerayishimiye gutangaCassette, ihitamo ryiza ryo gufata wafer mubidukikije aho imiti irwanya imiti nigihe kirekire. Iyi cassette yakozwe mubikoresho byera cyane bya Perfluoroalkoxy (PFA), iyi cassette yashizweho kugirango ihangane nibisabwa cyane muguhimba semiconductor, kurinda umutekano nubusugire bwa wafer yawe.
Imiti idasanzwe yo kurwanya imitiUwitekaCassetteni injeniyeri kugirango itange imbaraga zirwanya imiti myinshi, bigatuma ihitamo neza inzira zirimo aside ikaze, ibishishwa, nindi miti ikaze. Iyi miti ikomeye irwanya imiti ituma cassette ikomeza kuba ntamakemwa kandi ikora ndetse no mubidukikije byangirika cyane, bityo ikongerera igihe cyayo kandi ikagabanya gukenera gusimburwa kenshi.
Ubwubatsi BwuzuyeSemicera'sCassetteikozwe mubikoresho bya ultra-byera bya PFA, bifite akamaro mukurinda kwanduza mugihe cyo gutunganya wafer. Iyi nyubako ifite isuku nke igabanya ibyago byo kubyara uduce duto no guterwa imiti, byemeza ko wafer yawe irinzwe umwanda ushobora guhungabanya ubuziranenge bwabo.
Kuzamura Kuramba no GukoraByashizweho kugirango birambe ,.Cassetteikomeza uburinganire bwimiterere yubushyuhe bukabije nuburyo bukomeye bwo gutunganya. Yaba ihuye nubushyuhe bwinshi cyangwa ikorerwa inshuro nyinshi, iyi cassette igumana imiterere nimikorere, itanga ubwizerwe bwigihe kirekire mugusaba ibidukikije bikora.
Ubwubatsi Bwuzuye bwo Gukemura UmutekanoUwitekaSemicera PFA CassetteIbiranga ubwubatsi buteganya neza umutekano uhamye. Buri kibanza cyateguwe neza kugirango gifate waferi ahantu hizewe, hirindwa ikintu icyo ari cyo cyose cyangwa guhinduranya bishobora kuviramo kwangirika. Ubu buhanga bwuzuye bushyigikira ibyerekezo bihamye kandi byukuri, bigira uruhare mubikorwa rusange.
Porogaramu zitandukanye Muburyo bwoseTurashimira ibintu byingenzi birenze ibintu ,.Cassetteni byinshi bihagije kugirango bikoreshwe mubyiciro bitandukanye byo guhimba semiconductor. Irakwiranye cyane cyane no gutobora neza, kubika imyuka ya chimique (CVD), nibindi bikorwa birimo imiti ikaze y’ibidukikije. Guhuza n'imihindagurikire yacyo bituma iba igikoresho cyingenzi mu gukomeza ubunyangamugayo n’ubuziranenge bwa wafer.
Kwiyemeza ubuziranenge no guhanga udushyaMuri Semicera, twiyemeje gutanga ibicuruzwa byujuje ubuziranenge bwinganda. UwitekaCassettebyerekana ubu bwitange, butanga igisubizo cyizewe gihuza ntakuka mubikorwa byawe byo gukora. Buri cassette igenzurwa neza kugirango irebe ko yujuje ibipimo ngenderwaho byimikorere, itanga ibyiza utegereje kuri Semicera.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
