UwitekaIkirahuri cya Quartzkuva muri Semicera byateguwe neza kubikorwa byogukora cyane mubikorwa bya semiconductor ninganda zijyanye nabyo. Byakozwe kuvakwiza kwinshi, iyi pedeste itanga ubushyuhe budasanzwe bwumuriro no kurwanya imiti, bigatuma biba byiza kubidukikije.
Ikibanza cacu cya quartz gitanga inkunga yizewe mugihe gikomeye nka LPCVD (Umuvuduko muke wa chimique Vapor Deposition) hamwe no gukwirakwizawaferinzira. Hamwe nubwiza bwayo buhebuje, ikirahuri cya silika cyahujwe gikoreshwa mukubaka ibyicaro byacu bigabanya ingaruka zanduza, byemeza ubusugire bwibicuruzwa byawe.
Muri Semicera, twiyemeje gutanga ibicuruzwa byiza-byujuje ubuziranenge bwinganda. IwacuIkirahuri cya Quartzyashizweho kugirango ishyigikire inzira zitandukanye mugihe gikomeza kuramba no kwizerwa. Haba ubushakashatsi, iterambere, cyangwa umusaruro, iyi pedeste nikintu cyingenzi kugirango ugere kubisubizo byiza mubikorwa byawe.
twumva akamaro k'ibikoresho byiza murwego rwa semiconductor. Ibirahuri byahujwe na quartz ibirahure ntibiramba gusa ahubwo nibiciro byapiganwa. Quartz yahujwe ikoreshwa muri pedestale yacu itanga imikorere myiza, bigatuma ihitamo neza kubanyamwuga bashaka kwizerwa bitabangamiye ubuziranenge.
Ibyiza bya Fused Quartz Ibikoresho
1.Kurwanya Ubushyuhe Bwinshi
Ikiraro cya Fused Quartz gifite ahantu horoheje nko kuri 1730 ° C, bituma gishobora kwihanganira ikoreshwa igihe kirekire ku bushyuhe buri hagati ya 1100 ° C na 1250 ° C. Byongeye kandi, irashobora kwihanganira guhura nigihe gito nubushyuhe bugera kuri 1450 ° C.
2. Kurwanya ruswa
Fused Quartz Pedestal yinjizwamo imiti muri acide nyinshi, usibye aside hydrofluoric. Kurwanya aside iruta iy'ububumbyi inshuro 30 naho ibyuma bitagira umwanda inshuro 150. Ku bushyuhe bwo hejuru, nta bindi bikoresho bishobora guhuza imiti ya quartz yahujwe, bigatuma ihitamo neza ibidukikije bikabije.
3. Guhagarara neza
Kimwe mu bintu bigaragara biranga Fused Quartz Pedestal ni coefficente ntoya yo kwagura ubushyuhe. Uyu mutungo uyemerera kwihanganira ihindagurika ryubushyuhe bukabije nta gucika. Kurugero, irashobora gushyuha byihuse kugeza kuri 1100 ° C hanyuma ikinjizwa mumazi mubushyuhe bwicyumba nta byangiritse - ikintu cyingenzi kiranga ibikorwa byo gukora cyane.
