RTP CVD Impeta

Ibisobanuro bigufi:

Impeta ya RTP CVD SiC igizwe ahanini na karubide ya silicon (SiC), imiterere yimiti nuburyo bwa kristu itanga imikorere myiza. Carbide ya silicon ni ibikoresho byubutaka bifite aho bishonga cyane, ubukana bwinshi kandi birwanya ruswa. Yerekana ubushyuhe bwiza bwumuriro hamwe nubushakashatsi bwimiti mubushyuhe bwinshi, kandi bifite imbaraga zumukanishi kandi birwanya kwihanganira.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Kuki Silicon Carbide Etching Impeta?

RTPCVD SiC impetazikoreshwa cyane mubikorwa byinganda nubumenyi mubushyuhe bwinshi nibidukikije byangirika. Ifite uruhare runini mu gukora semiconductor, optoelectronics, imashini zisobanutse ninganda zikora imiti. Porogaramu zihariye zirimo:

1. Gukora Semiconductor:RTP CVD SiC impetaIrashobora gukoreshwa mugushushya no gukonjesha ibikoresho bya semiconductor, gutanga ubushyuhe buhamye no kwemeza neza inzira.

2. Optoelectronics: Bitewe nubushyuhe bwiza bwumuriro hamwe nubushyuhe bwo hejuru, RTPCVD SiC impetaIrashobora gukoreshwa nkibikoresho hamwe nubushyuhe bwo gukwirakwiza laseri, ibikoresho byitumanaho rya fibre optique nibikoresho bya optique.

4. Inganda zikora imiti: Bitewe no kwangirika kwangirika no gutuza imiti, impeta ya RTP CVD SiC irashobora gukoreshwa mubikoresho, imiyoboro hamwe na reaktori mubikorwa bya chimique hamwe na catalitiki.

Epi Sisitemu

Sisitemu ya RTP

Sisitemu ya CVD

Imikorere y'ibicuruzwa:

1. Hura inzira iri munsi ya 28nm

2. Kurwanya ruswa

3. Imikorere isukuye cyane

4. Gukomera cyane

5. Ubucucike bukabije

6. Kurwanya ubushyuhe bwinshi

7. Kwambara ibiturwanya

Gusaba ibicuruzwa:

Ibikoresho bya karubide ya silikoni bifite ibiranga ubukana bwinshi, kurwanya kwambara, kurwanya ruswa no guhagarara neza. Ibicuruzwa bifite imikorere yuzuye ikoreshwa cyane mugukama byumye na TF / Diffusion inzira.