SemiceraKumenyekanishaAmashanyarazi ya Cassette, igikoresho cyingenzi muburyo bwiza kandi bunoze bwo gukora wafers murwego rwo gukora igice cya kabiri. Byakozwe neza cyane, iyi cassette iremeza ko wafer yawe ibitswe neza kandi igatwarwa neza, igakomeza ubunyangamugayo kuri buri cyiciro.
Kurinda Kuruta no KurambaUwitekaAmashanyarazi ya Cassettekuva muri Semicera yubatswe kugirango itange uburinzi ntarengwa kuri wafer yawe. Yubatswe mubikoresho bikomeye, birwanya umwanda, birinda waferi yawe ibyangiritse no kwanduza, bigatuma ihitamo neza kubidukikije. Igishushanyo cya cassette kigabanya kubyara uduce duto kandi cyemeza ko waferi idakomeza gukoraho kandi ifite umutekano mugihe cyo gutwara no gutwara.
Gutezimbere Igishushanyo Cyiza CyizaSemicera'sAmashanyarazi ya Cassettebiranga igishushanyo mbonera cyakozwe neza gitanga guhuza neza wafer, kugabanya ibyago byo kudahuza no kwangirika kwa mashini. Ahantu kaseti hashyizwe neza kugirango ufate buri wafer neza, wirinde ikintu icyo ari cyo cyose gishobora kuvamo gushushanya cyangwa ubundi busembwa.
Guhinduranya no GuhuzaUwitekaAmashanyarazi ya Cassetteni byinshi kandi bihujwe nubunini butandukanye bwa wafer, bigatuma bikwiranye nibyiciro bitandukanye byo guhimba semiconductor. Waba ukorana nuburinganire busanzwe cyangwa bwihariye, iyi cassette ihuza nibyo ukeneye, itanga ibintu byoroshye mubikorwa byawe byo gukora.
Gukemura neza no gukora nezaByashizweho hamwe nu mukoresha mubitekerezo, iSemicera Semiconductor Cassetteni yoroshye kandi yoroshye kubyitwaramo, itanga uburyo bwihuse kandi bunoze bwo gupakira no gupakurura. Igishushanyo mbonera cya ergonomic ntikiza igihe gusa ahubwo kigabanya ibyago byamakosa yabantu, bigatuma ibikorwa bigenda neza mubigo byawe.
Kuzuza ibipimo ngandaSemicera iremeza koAmashanyarazi ya Cassetteyujuje amahame yo mu rwego rwo hejuru yubuziranenge no kwizerwa. Buri cassette ikorerwa ibizamini bikomeye kugirango yemeze ko ikora buri gihe mubihe bisabwa byo gukora semiconductor. Uku kwitangira ubuziranenge byemeza ko wafer yawe ihora ikingiwe, ikomeza amahame yo hejuru asabwa mu nganda.
Ibintu | Umusaruro | Ubushakashatsi | Dummy |
Ibipimo bya Crystal | |||
Polytype | 4H | ||
Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
Ibipimo by'amashanyarazi | |||
Dopant | Ubwoko bwa Azote | ||
Kurwanya | 0.015-0.025ohm · cm | ||
Ibipimo bya mashini | |||
Diameter | 150.0 ± 0.2mm | ||
Umubyimba | 350 ± 25 mm | ||
Icyerekezo cyibanze | [1-100] ± 5 ° | ||
Uburebure bwibanze | 47.5 ± 1.5mm | ||
Igice cya kabiri | Nta na kimwe | ||
TTV | ≤5 mm | ≤10 mm | ≤15 mm |
LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
Imiterere | |||
Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
Umwanda | ≤5E10atoms / cm2 | NA | |
BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
Ubwiza bw'imbere | |||
Imbere | Si | ||
Kurangiza | Si-face CMP | ||
Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
Ikimenyetso cya laser imbere | Nta na kimwe | ||
Inyuma Yinyuma | |||
Kurangiza | C-isura CMP | ||
Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
Inenge zinyuma (chips / indents) | Nta na kimwe | ||
Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
Impande | |||
Impande | Chamfer | ||
Gupakira | |||
Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. |