Amashanyarazi ya Cassette

Ibisobanuro bigufi:

Amashanyarazi ya Cassette- Kurinda no gutwara wafer yawe neza neza ukoresheje Cassette ya Semiconra ya Semicera, igamije kurinda umutekano mwiza no gukora neza mubikorwa byubuhanga buhanitse.


Ibicuruzwa birambuye

Ibicuruzwa

SemiceraKumenyekanishaAmashanyarazi ya Cassette, igikoresho cyingenzi muburyo bwiza kandi bunoze bwo gukora wafers murwego rwo gukora igice cya kabiri. Byakozwe neza cyane, iyi cassette iremeza ko wafer yawe ibitswe neza kandi igatwarwa neza, igakomeza ubunyangamugayo kuri buri cyiciro.

Kurinda Kuruta no KurambaUwitekaAmashanyarazi ya Cassettekuva muri Semicera yubatswe kugirango itange uburinzi ntarengwa kuri wafer yawe. Yubatswe mubikoresho bikomeye, birwanya umwanda, birinda waferi yawe ibyangiritse no kwanduza, bigatuma ihitamo neza kubidukikije. Igishushanyo cya cassette kigabanya kubyara uduce duto kandi cyemeza ko waferi idakomeza gukoraho kandi ifite umutekano mugihe cyo gutwara no gutwara.

Igishushanyo Cyiza cyo Gukora nezaSemicera'sAmashanyarazi ya Cassettebiranga igishushanyo mbonera cyakozwe neza gitanga guhuza neza wafer, kugabanya ibyago byo kudahuza no kwangirika kwa mashini. Ahantu kaseti hashyizwe neza kugirango ufate buri wafer neza, wirinde ikintu icyo ari cyo cyose gishobora kuvamo gushushanya cyangwa kudatungana.

Guhinduranya no GuhuzaUwitekaAmashanyarazi ya Cassetteni byinshi kandi bihujwe nubunini butandukanye bwa wafer, bigatuma bikwiranye nibyiciro bitandukanye byo guhimba semiconductor. Waba ukorana n'ibipimo bisanzwe bya wafer, iyi cassette ihuza nibyo ukeneye, itanga ibintu byoroshye mubikorwa byawe byo gukora.

Gukemura neza no gukora nezaByashizweho hamwe nu mukoresha mubitekerezo, iSemicera Semiconductor Cassetteni yoroshye kandi yoroshye kubyitwaramo, itanga uburyo bwihuse kandi bunoze bwo gupakira no gupakurura. Igishushanyo mbonera cya ergonomic ntikiza igihe gusa ahubwo kigabanya ibyago byamakosa yabantu, bigatuma ibikorwa bigenda neza mubigo byawe.

Kuzuza ibipimo ngandaSemicera iremeza koAmashanyarazi ya Cassetteyujuje amahame yo mu rwego rwo hejuru yubuziranenge no kwizerwa. Buri cassette ikorerwa ibizamini bikomeye kugirango yemeze ko ikora buri gihe mubihe bisabwa byo gukora igice cya kabiri. Uku kwitangira ubuziranenge byemeza ko wafer yawe ihora ikingiwe, ikomeza amahame yo hejuru asabwa mu nganda.

Ibintu

Umusaruro

Ubushakashatsi

Dummy

Ibipimo bya Crystal

Polytype

4H

Ikosa ryerekana icyerekezo

<11-20> 4 ± 0.15 °

Ibipimo by'amashanyarazi

Dopant

Ubwoko bwa Azote

Kurwanya

0.015-0.025ohm · cm

Ibipimo bya mashini

Diameter

150.0 ± 0.2mm

Umubyimba

350 ± 25 mm

Icyerekezo cyibanze

[1-100] ± 5 °

Uburebure bwibanze

47.5 ± 1.5mm

Igice cya kabiri

Nta na kimwe

TTV

≤5 mm

≤10 mm

≤15 mm

LTV

≤3 μm (5mm * 5mm)

≤5 μm (5mm * 5mm)

≤10 μ m (5mm * 5mm)

Umuheto

-15 mm ~ 15 mm

-35μm ~ 35μm

-45μm ~ 45μm

Intambara

≤35 mm

≤45 mm

≤55 mm

Imbere (Si-face) ubukana (AFM)

Ra≤0.2nm (5μm * 5μm)

Imiterere

Ubucucike bwa Micropipe

<1 ea / cm2

<10 ea / cm2

<15 ea / cm2

Umwanda

≤5E10atoms / cm2

NA

BPD

≤1500 ea / cm2

0003000 ea / cm2

NA

TSD

≤500 ea / cm2

0001000 ea / cm2

NA

Ubwiza bw'imbere

Imbere

Si

Kurangiza

Si-face CMP

Ibice

≤60ea / wafer (ubunini≥0.3μm)

NA

Igishushanyo

≤5ea / mm. Uburebure bwuzuye ≤Ibipimo

Uburebure bwuzuye≤2 * Diameter

NA

Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza

Nta na kimwe

NA

Imipira yimpande / ibyerekana / kuvunika / isahani

Nta na kimwe

Agace ka polytype

Nta na kimwe

Agace kegeranye ≤20%

Agace kegeranye ≤30%

Ikimenyetso cya laser imbere

Nta na kimwe

Inyuma Yinyuma

Kurangiza

C-isura CMP

Igishushanyo

≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter

NA

Inenge zinyuma (chips / indents)

Nta na kimwe

Inyuma yinyuma

Ra≤0.2nm (5μm * 5μm)

Ikimenyetso cya laser inyuma

Mm 1 (uhereye hejuru)

Impande

Impande

Chamfer

Gupakira

Gupakira

Epi-yiteguye hamwe no gupakira vacuum

Gupakira cassette nyinshi

* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD.

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SiC wafers

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