SiC Cantilever paddleirimo gukoreshwa mu itanura rya diffusion coating itanura yinganda zifotora kugirango zifate monocrystalline na polycrystalline silicon wafers. Ibiranga bimushoboza kwihanganira ubushyuhe bwo hejuru no kwangirika, bikamuha igihe kirekire.
UwitekaSiC Cantilever paddleitanga ubwato bwa SiC / ubwato bwa quartz butwara wafer ya silicon mumashanyarazi yo hejuru yubushyuhe bwo gukwirakwiza itanura.
Uburebure bwacuSiC Cantilever paddlehagati ya 1.500 na 3.500 mm.SiC Cantilever paddle'sibipimo birashobora kuba umudozi wakozwe ukurikije ibisobanuro byabakiriya.
Ibintu bifatika bya Silicon Carbide yongeye gushyirwaho | |
Umutungo | Agaciro gasanzwe |
Ubushyuhe bwo gukora (° C) | 1600 ° C (hamwe na ogisijeni), 1700 ° C (kugabanya ibidukikije) |
Ibirimo | > 99,96% |
Ibirimo Si kubuntu | <0.1% |
Ubucucike bwinshi | 2.60-2.70 g / cm3 |
Ikigaragara | <16% |
Imbaraga zo kwikuramo | > 600 MPa |
Imbaraga zikonje | 80-90 MPa (20 ° C) |
Imbaraga zunamye | 90-100 MPa (1400 ° C) |
Kwiyongera k'ubushyuhe @ 1500 ° C. | 4.70 10-6/ ° C. |
Ubushyuhe bwumuriro @ 1200 ° C. | 23 W / m • K. |
Modulus | 240 GPa |
Kurwanya ubushyuhe | Nibyiza cyane |