Silicon carbide cantilever paddle

Ibisobanuro bigufi:

Silicon carbide paddle, izwi kandi nka silicon carbide cantilever paddle, silicon carbide cantilever beam ni ubwoko bwibikoresho bya ceramic ya silicon nyuma ya 1850ubushyuhe bwo hejuru, ariko ubushyuhe bwo hejuru bwa silicon karbide ceramic nibicuruzwa bidasanzwe byubutaka, kubice byizaα-SiC ninyongeramusaruro zashyizwe mubusa, uhuye na silikoni yamazi hejuru yubushyuhe bwinshi, karubone mubusa no gucengera kwa Si reaction, gushirahoβ-SiC,Kandi uhujwe na α-SiC, silikoni yubusa yuzuyemo porosity, kugirango ubone ibikoresho bya ceramic byuzuye cyane; Ifite ibintu bitandukanye biruta ubukorikori bwinganda.

 


Ibicuruzwa birambuye

Ibicuruzwa

SiC Cantilever paddleirimo gukoreshwa mu itanura rya diffusion coating itanura yinganda zifotora kugirango zifate monocrystalline na polycrystalline silicon wafers. Ibiranga bimushoboza kwihanganira ubushyuhe bwo hejuru no kwangirika, bikamuha igihe kirekire.
UwitekaSiC Cantilever paddleitanga ubwato bwa SiC / ubwato bwa quartz butwara wafer ya silicon mumashanyarazi yo hejuru yubushyuhe bwo gukwirakwiza itanura.
Uburebure bwacuSiC Cantilever paddlehagati ya 1.500 na 3.500 mm.SiC Cantilever paddle'sibipimo birashobora kuba umudozi wakozwe ukurikije ibisobanuro byabakiriya.

Ibintu bifatika bya Silicon Carbide yongeye gushyirwaho

Umutungo

Agaciro gasanzwe

Ubushyuhe bwo gukora (° C)

1600 ° C (hamwe na ogisijeni), 1700 ° C (kugabanya ibidukikije)

Ibirimo

> 99,96%

Ibirimo Si kubuntu

<0.1%

Ubucucike bwinshi

2.60-2.70 g / cm3

Ikigaragara

<16%

Imbaraga zo kwikuramo

> 600 MPa

Imbaraga zikonje

80-90 MPa (20 ° C)

Imbaraga zunamye

90-100 MPa (1400 ° C)

Kwiyongera k'ubushyuhe @ 1500 ° C.

4.70 10-6/ ° C.

Ubushyuhe bwumuriro @ 1200 ° C.

23 W / m • K.

Modulus

240 GPa

Kurwanya ubushyuhe

Nibyiza cyane

Silicon carbide cantilever paddle-2
Silicon carbide cantilever paddle Yerekanwe Ishusho
0f75f96b9a8d9016a504c0c47e59375
Ahantu ho gukorera
Ahantu ho gukorera Semicera 2
Imashini y'ibikoresho
Gutunganya CNN, gusukura imiti, gutwikira CVD
Inzu y'Ububiko bwa Semicera
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