SemiceraSilicon Carbide Ceramic Coatingni igikoresho kinini cyo gukingira gikozwe mubintu bikomeye cyane kandi birinda kwambara silicon karbide (SiC). Ubusanzwe igifuniko gishyirwa hejuru yubutaka na CVD cyangwa PVD hamwe nasilicon karbide ibice, gutanga imiti myiza yo kurwanya ruswa hamwe nubushyuhe bwo hejuru. Kubwibyo, Silicon Carbide Ceramic Coating ikoreshwa cyane mubice byingenzi bigize ibikoresho bya semiconductor.
Mu gukora igice cya kabiri,SiCIrashobora kwihanganira ubushyuhe bwo hejuru cyane bugera kuri 1600 ° C, bityo rero Silicon Carbide Ceramic Coating ikunze gukoreshwa nkigikoresho cyo gukingira ibikoresho cyangwa ibikoresho kugirango wirinde kwangirika kwubushyuhe bwinshi cyangwa ibidukikije byangirika.
Igihe kimwe,silicon karbide ceramicIrashobora kurwanya isuri ya acide, alkalis, oxyde nizindi miti yimiti, kandi ifite ruswa irwanya ibintu byinshi byimiti. Kubwibyo, iki gicuruzwa gikwiranye nibidukikije bitandukanye byangirika munganda ziciriritse.
Byongeye kandi, ugereranije nibindi bikoresho byubutaka, SiC ifite ubushyuhe bwinshi kandi irashobora gutwara ubushyuhe neza. Iyi miterere igena ko mubikorwa bya semiconductor bisaba kugenzura neza ubushyuhe, ubushyuhe bwo hejuru bwumuriro waSilicon Carbide Ceramic Coatingifasha gukwirakwiza ubushyuhe, kurinda ubushyuhe bwaho, no kwemeza ko igikoresho gikora ubushyuhe bwiza.
| Ibintu byibanze bifatika bya CVD sic | |
| Umutungo | Agaciro gasanzwe |
| Imiterere ya Crystal | FCC β icyiciro polycrystalline, cyane cyane (111) yerekanwe |
| Ubucucike | 3.21 g / cm³ |
| Gukomera | 2500 Gukomera kwa Vickers （500g umutwaro） |
| Ingano SiZe | 2 ~ 10 mm |
| Ubuziranenge bwa Shimi | 99.99995% |
| Ubushyuhe | 640 J · kg-1· K.-1 |
| Ubushyuhe bwo hejuru | 2700 ℃ |
| Imbaraga zoroshye | 415 MPa RT amanota 4 |
| Umusore Modulus | 430 Gpa 4pt yunamye, 1300 ℃ |
| Amashanyarazi | 300W · m-1· K.-1 |
| Kwagura Ubushyuhe (CTE) | 4.5 × 10-6K-1 |
