Ibisobanuro
Abatwara Semicorex Wafer hamwe na SiC Coating itanga ubushyuhe budasanzwe nubushyuhe bwumuriro, bigatuma ubushyuhe bukwirakwizwa mugihe cya CVD, ingenzi cyane kuri firime nziza kandi yoroheje.
Ibintu by'ingenzi:
1. Ubushuhe buhebuje bwo gushyuha no kuyoboraAbatwara ibicuruzwa bya SiC bifatanije cyane mugukomeza ubushyuhe buhamye kandi buhoraho, nibyingenzi mubikorwa bya CVD. Ibi bitanga ubushyuhe bumwe, biganisha kuri firime nziza kandi nziza.
2. Gukora nezaBuri bwikorezi bwa wafer bukozwe mubipimo bisabwa, byemeza ubunini bumwe n'ubuso bworoshye. Ubu busobanuro nibyingenzi kugirango tugere ku gipimo gihoraho cyo kubitsa hamwe nu mutungo wa firime muri wafer nyinshi, bizamura ubwiza bwinganda.
3. Inzitizi yanduyeIpfundikizo ya SiC ikora nk'inzitizi itemewe, irinda ikwirakwizwa ry'imyanda iva muri suseptor muri wafer. Ibi bigabanya ingaruka ziterwa no kwanduza, ningirakamaro mugukora ibikoresho bya semiconductor byera cyane.
4. Kuramba no gukora nezaUbwubatsi bukomeye hamwe nububiko bwa SiC byongera uburebure bwabatwara wafer, bikagabanya inshuro zo gusimbuza susceptor. Ibi biganisha kumafaranga make yo kubungabunga no kugabanya igihe cyo hasi, byongera imikorere yibikorwa bya semiconductor.
5. Amahitamo yihariyeAbatwara Semicorex Wafer hamwe na SiC Coating irashobora guhindurwa kugirango ihuze ibisabwa byihariye, harimo gutandukana mubunini, imiterere, n'ubunini bwa coating. Ihinduka ryemerera optimizasse guhuza guhuza ibyifuzo byihariye bya semiconductor zitandukanye. Guhitamo ibicuruzwa bifasha iterambere ryibishushanyo mbonera bigenewe porogaramu zihariye, nk'ibikorwa byinshi byo gukora cyangwa ubushakashatsi n'iterambere, byemeza imikorere myiza kubibazo byakoreshejwe.
Porogaramu:
Abatwara Semicera Wafer hamwe na SiC Coating birakwiriye:
• Gukura kwa Epitaxial yibikoresho bya semiconductor
• Uburyo bwo kubika imyuka ya chimique (CVD)
• Umusaruro wa waferi nziza cyane
• Porogaramu igezweho yo gukora inganda
Ibisobanuro bya tekiniki ：
