Silicon Carbide horizontal-chamber itanura wafer ubwato

Ibisobanuro bigufi:

Semicera itanga ubwato bwa wafer, ufite, na Customer wafer itwara vertical / inkingi na horizontal iboneza. Ubukorikori buhanitse butanga ubushyuhe buhebuje hamwe na plasma iramba, mugihe ugabanya ibice byangiza. Semiconductor yo mu rwego rwa silicon karbide (SiC) nayo itanga imbaraga zubushyuhe bwo hejuru kubatwara wafer ifite ubushobozi bwinshi.


Ibicuruzwa birambuye

Ibicuruzwa

LPCVD yacu(Umuvuduko muke wa chimique yohereza imyuka)Ubwato bwa Carbideikozwe nubuhanga bugezweho, bwagenewe gukora ubushyuhe bwo hejuru bwa semiconductor. Ubu bwizasilicon carbide ubwatoitanga imikorere idasanzwe no kwizerwa mubihe bikabije, bigatuma ihitamo neza kubihimbano bya semiconductor nibindi bikorwa byubushyuhe bwo hejuru.

 

Ibintu by'ingenzi

 

Ubushyuhe bwo hejuru:Iwacusilicon carbide ubwatokwihanganira ubushyuhe bugera kuri1700° C, kwemeza ituze n'imikorere mubikorwa bikomeza ubushyuhe bwo hejuru.

Ubuvuzi bwa Shimi:Hamwe n’imiti ihamye y’imiti, irwanya ruswa ikomoka kuri acide, shingiro, n’indi miti yangirika, bigatuma iramba ikoreshwa igihe kirekire.

Ubushyuhe bwo hejuru bwa Thermal:Ubushyuhe bwo hejuru cyane butuma ubushyuhe bukwirakwizwa mu bwato, bigira uruhare mu kuzamura ibicuruzwa no guhoraho.

Imbaraga no Kwambara Kurwanya:Imbaraga zidasanzwe za mashini hamwe no kwambara birwanya gukoreshwa guhoraho nta byangiritse, kugabanya inshuro zisimburwa nigiciro.

 

Porogaramu:

Birakwiriye muburyo butandukanye bwubushyuhe bwo hejuru, harimo ariko ntibugarukira gusa mubikorwa bya semiconductor, kubyara izuba, hamwe nubushyuhe bwo hejuru. Imikorere yacyo yo hejuru no kwizerwa bituma ihitamo neza kubisabwa bisaba.

 

Kuki GuhitamoLPCVD yacuSilicon Carbide Boat?

Twiyemeje gutanga ibipimo bihanitse byibicuruzwa na serivisi.LPCVD yacuUbwato bwa Carbidentabwo itanga imikorere myiza kandi iramba gusa ahubwo ifasha no kunoza umusaruro nubuziranenge, kugabanya ibiciro byakazi. Guhitamo bisobanura guhitamo umufatanyabikorwa wizewe kugirango uteze imbere ubucuruzi bwawe imbere.

 

Ibyacu

 

Aho ukorera

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Ububiko

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Amahugurwa yacu

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