Filime ya Silicon yakozwe na Semicera nibikoresho byujuje ubuziranenge, bikozwe neza-byakozwe neza kugirango byuzuze ibisabwa bikenewe mu nganda za semiconductor. Yakozwe muri silicon isukuye, iki gisubizo cyoroshye cya firime gitanga uburinganire buhebuje, ubuziranenge bwinshi, hamwe nubushakashatsi budasanzwe bwamashanyarazi nubushyuhe. Nibyiza gukoreshwa mubikoresho bitandukanye bya semiconductor, harimo umusaruro wa Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, na Epi-Wafer. Filime ya Silicon ya Semicera itanga imikorere yizewe kandi ihamye, ikagira ibikoresho byingenzi bya mikorobe yateye imbere.
Ubwiza buhebuje nubushobozi bwo gukora Semiconductor
Filime ya Silicon ya Semicera izwiho imbaraga zidasanzwe zubukanishi, ituze ryinshi ryumuriro, hamwe nigipimo gito gifite inenge, ibyo byose nibyingenzi muguhimba ibyuma bikora neza cyane. Yaba ikoreshwa mugukora ibikoresho bya Gallium Oxide (Ga2O3), AlN Wafer, cyangwa Epi-Wafers, film itanga umusingi ukomeye wo gushira firime yoroheje no gukura kwa epitaxial. Ihuzwa nizindi nteruro ya semiconductor nka SiC Substrate na SOI Wafers ituma habaho kwishyira hamwe mubikorwa byinganda zisanzwe, bifasha kugumana umusaruro mwinshi hamwe nubwiza bwibicuruzwa bihoraho.
Porogaramu mu nganda za Semiconductor
Mu nganda ziciriritse, Filime ya Silicon ya Semicera ikoreshwa muburyo butandukanye, uhereye ku bicuruzwa bya Si Wafer na SOI Wafer kugeza ku mikoreshereze yihariye nka SiN Substrate na Epi-Wafer. Isuku ryinshi nubusobanuro bwiyi firime bituma biba ngombwa mugukora ibice bigezweho bikoreshwa muri byose kuva microprocessor hamwe na sisitemu ihuriweho kugeza ibikoresho bya optoelectronic.
Filime ya Silicon igira uruhare runini mubikorwa bya semiconductor nko gukura kwa epitaxial, guhuza wafer, no kubika firime. Ibintu byizewe bifite agaciro cyane cyane mubikorwa bisaba ibidukikije bigenzurwa cyane, nkubwiherero muri fabic semiconductor fabs. Byongeye kandi, Filime ya Silicon irashobora kwinjizwa muri sisitemu ya cassette kugirango ikoreshwe neza wafer no gutwara mugihe cyo gukora.
Igihe kirekire Kwizerwa no Guhoraho
Imwe mu nyungu zingenzi zo gukoresha Filime ya Silicon ya Semicera niyizerwa ryigihe kirekire. Hamwe nigihe kirekire cyiza kandi cyiza, iyi firime itanga igisubizo cyizewe kubidukikije byinshi. Yaba ikoreshwa mubikoresho bisobanutse neza cyangwa ibikoresho bya elegitoroniki bigezweho, Filime ya Silicon ya Semicera iremeza ko abayikora bashobora kugera kubikorwa byiza kandi byizewe mubicuruzwa byinshi.
Kuki Hitamo Filime ya Silicon?
Filime ya Silicon yo muri Semicera nibikoresho byingenzi mugukoresha porogaramu zigezweho mu nganda ziciriritse. Ibikorwa byayo-byiza cyane, harimo nubushyuhe buhebuje bwumuriro, ubuziranenge bwinshi, nimbaraga za mashini, bituma ihitamo neza kubabikora bashaka kugera kubipimo bihanitse mubikorwa bya semiconductor. Kuva kuri Si Wafer na SiC Substrate kugeza kubyara ibikoresho bya Gallium Oxide Ga2O3, iyi film itanga ubuziranenge nibikorwa bitagereranywa.
Hamwe na Filime ya Silicon ya Semicera, urashobora kwizera ibicuruzwa byujuje ibyifuzo byinganda zigezweho, bitanga umusingi wizewe kubisekuruza bizaza.
Ibintu | Umusaruro | Ubushakashatsi | Dummy |
Ibipimo bya Crystal | |||
Polytype | 4H | ||
Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
Ibipimo by'amashanyarazi | |||
Dopant | Ubwoko bwa Azote | ||
Kurwanya | 0.015-0.025ohm · cm | ||
Ibipimo bya mashini | |||
Diameter | 150.0 ± 0.2mm | ||
Umubyimba | 350 ± 25 mm | ||
Icyerekezo cyibanze | [1-100] ± 5 ° | ||
Uburebure bwibanze | 47.5 ± 1.5mm | ||
Igice cya kabiri | Nta na kimwe | ||
TTV | ≤5 mm | ≤10 mm | ≤15 mm |
LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
Imiterere | |||
Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
Umwanda | ≤5E10atoms / cm2 | NA | |
BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
Ubwiza bw'imbere | |||
Imbere | Si | ||
Kurangiza | Si-face CMP | ||
Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
Ikimenyetso cya laser imbere | Nta na kimwe | ||
Inyuma Yinyuma | |||
Kurangiza | C-isura CMP | ||
Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
Inenge zinyuma (chips / indents) | Nta na kimwe | ||
Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
Impande | |||
Impande | Chamfer | ||
Gupakira | |||
Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. |