Silicon ya Silicon On Insulator (SOI) Wafer iri ku isonga mu guhanga udushya twa semiconductor, itanga ingufu zo kwigunga no gukora neza cyane. Imiterere ya SOI, igizwe na silicon yoroheje kurwego rwo hejuru, itanga inyungu zikomeye kubikoresho bya elegitoroniki bikora cyane.
Wafers yacu ya SOI yagenewe kugabanya ubushobozi bwa parasitike nubushobozi bwo gutemba, nibyingenzi mugutezimbere umuvuduko mwinshi kandi ufite ingufu nkeya. Iri koranabuhanga ryateye imbere ryemeza ko ibikoresho bikora neza, hamwe n'umuvuduko wihuse kandi bikagabanya gukoresha ingufu, byingenzi kuri electronics zigezweho.
Ibikorwa byiterambere byateye imbere bikoreshwa na Semicera byemeza umusaruro wa SOI wafers hamwe nuburinganire buhebuje. Iyi miterere ningirakamaro mubisabwa mu itumanaho, mu modoka, no mu bikoresho bya elegitoroniki, aho bisabwa ibice byizewe kandi bikora neza.
Usibye inyungu zabo z'amashanyarazi, wafers ya SOI ya Semicera itanga ubushyuhe bwo hejuru bwumuriro, bikongerera ubushyuhe no gutuza mumashanyarazi menshi kandi afite ingufu nyinshi. Iyi mikorere ifite agaciro cyane mubikorwa birimo kubyara ubushyuhe bukomeye kandi bisaba gucunga neza ubushyuhe.
Muguhitamo Silicon ya Silicon Kuri Insulator Wafer, ushora mubicuruzwa bishyigikira iterambere ryikoranabuhanga rigezweho. Twiyemeje ubuziranenge no guhanga udushya twerekana ko wafers yacu ya SOI yujuje ibyifuzo bikenerwa ninganda zikoresha amashanyarazi muri iki gihe, bitanga umusingi wibikoresho bya elegitoroniki bizaza.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
