Semicera Silicon Substrates yakozwe kugirango ihuze ibyifuzo bikenerwa ninganda ziciriritse, zitanga ubuziranenge butagereranywa. Izi nteruro zitanga umusingi wizewe mubikorwa bitandukanye, uhereye kumuzunguruko uhujwe kugeza kuri selile yifotora, byemeza imikorere myiza no kuramba.
Isuku ryinshi rya Semicera Silicon Substrates itanga inenge nkeya nibiranga amashanyarazi arenze, aringirakamaro mugukora ibikoresho bya elegitoroniki bikora neza. Uru rwego rwisuku rufasha mukugabanya gutakaza ingufu no kuzamura imikorere rusange yibikoresho bya semiconductor.
Semicera ikoresha ubuhanga bugezweho bwo gukora inganda zo gukora silicon substrate hamwe nuburinganire budasanzwe. Ubu busobanuro nibyingenzi kugirango tugere ku bisubizo bihamye mu guhimba igice cya kabiri, aho ndetse no gutandukana kworoheje bishobora kugira ingaruka kumikorere no gutanga umusaruro.
Kuboneka muburyo butandukanye no mubisobanuro byihariye, Semicera Silicon Substrates ihuza ibintu byinshi bikenerwa mu nganda. Waba utezimbere microprocessors cyangwa imirasire yizuba, izi substrate zitanga ibintu byoroshye kandi byizewe bisabwa mubisabwa byihariye.
Semicera yitangiye gushyigikira udushya no gukora neza mu nganda za semiconductor. Mugutanga insimburangingo nziza cyane ya silicon, dushoboza abayikora gusunika imbibi zikoranabuhanga, gutanga ibicuruzwa byujuje ibyifuzo byisoko. Izere Semicera kubisekuruza byawe bizaza bya elegitoroniki na Photovoltaic ibisubizo.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
